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Edwards iH600 Dry Vacuum Pump - NEW

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RFQ

Manufacturer Part Number: A59020908
Edwards iH600 Dry Vacuum Pump - NEW
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Edwards iH600 Dry Vacuum Pump - NEW

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.

The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

 

Peak speed

600 m3h-1
353 cfm
10,000 lmin-1
Ultimate vacuum 7 x 10-4 mbar
5.3 x 10-4 Torr
0.07 Pa
Typical shaft seal nitrogen flow 4 slm
Inlet connection ISO100
Outlet connection NW40
Typical cooling water flow at 15 psi pressure drop     240 lh-1
4 lmin-1
Weight 415 kg
Power input at ultimate 3.4 kW
Rated motor power 6.1 kW
Oil capacity 1.43 l

 

All figures are typical without gas ballast.

Specs

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Edwards iH600 Dry Vacuum Pump - NEW

iH600 Dry Pump 460V, 60 Hz 3Ø
A59020908

iH600 Dry Pump 200/208V, 50/60 Hz 3Ø
A59020945

iH600 Dry Pump 380/415V, 50 Hz 3Ø
A59020946

iH600 Dry Pump 230V, 60 Hz 3Ø
A59020957

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