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Edwards iH600 Dry Vacuum Pump - REBUILT

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Manufacturer Part Number: A53351945XS
Edwards iH600 Dry Vacuum Pump - REBUILT
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Edwards iH600 Dry Vacuum Pump - REBUILT

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership. 

The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

Peak speed 600 m3h-1
  353 cfm
  10,000 l min>-1
Ultimate Vacuum 7 x 10-4 mbar
  5.3 x 10-4 Torr
  0.07 Pa
Typical shaft seal nitrogen flow 4 slm
Inlet connection ISO100
Outlet connection NW40
Typical cooling water flow at 15 psi pressure drop     240 l h-1
  4 l min-1
Weight 415 kg
Power input at ultimate 3.4 kW
Rated motor power 6.1 kW
Oil capacity 1.43 l

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Edwards iH600 Dry Vacuum Pump - REBUILT

iH600 Dry Pump 460V, 60 Hz 3Ø
A590-20-908		A59020908

iH600 Dry Pump 230V, 60 Hz 3Ø
A590-20-957		A59020957

iH600	208V 60Hz
A533-82-945		A53382945	

iH600	380/415V 50Hz
A533-82-946		A53382946

iH600 Enhanced	208V 60Hz
A533-86-945		A53386945	

iH600 Enhanced	380/415V 50Hz
A533-86-946		A53386946

iH600 HEAC	208V 60Hz
A533-41-945		A53341945	

iH600 HEAC	380/415V 50Hz
A533-41-946		A53341946

iH600 New Look	208V 60Hz
A533-51-945		A53351945	

iH600 New Look	380/415V 50Hz
A533-51-946		A53351946		

iH600 Mark V	208V 60Hz
A590-20-945		A59020945

iH600 Mark V	380/415V 50Hz
A590-20-946		A59020946

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