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Edwards iH600 - REBUILT

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Manufacturer Part Number: A53351945
Edwards iH600 - REBUILT
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Edwards iH600 - REBUILT

Edwards iH600 Semiconductor Dry Vacuum Pump - REBUILT

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership. 

The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Peak speed 600 m3h-1
  353 cfm
  10,000 l/min-1
Ultimate Vacuum 7 x 10-4 mbar
  5.3 x 10-4 Torr
  0.07 Pa
Typical shaft seal nitrogen flow 4 slm
Inlet connection ISO100
Outlet connection NW40
Typical cooling water flow at 15 psi pressure drop     240 l/h-1
  4 l/min-1
Weight 415 kg
Power input at ultimate 3.4 kW
Rated motor power 6.1 kW
Oil capacity 1.43 l

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Edwards iH600 Semiconductor Dry Vacuum Pump - REBUILT

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A53386945 / A533-86-945  iH600 Enhanced System  208V 60Hz
A53386946 / A533-86-946  iH600 Enhanced System  380/415V 50Hz
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