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Edwards iH600 Dry Vacuum Pump - REBUILT

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Manufacturer Part Number: A53351945
Edwards iH600 Dry Vacuum Pump - REBUILT
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Edwards iH600 Semiconductor Dry Vacuum Pump - REBUILT

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership. 

The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Peak speed 600 m3h-1
  353 cfm
  10,000 l min-1
Ultimate Vacuum 7 x 10-4 mbar
  5.3 x 10-4 Torr
  0.07 Pa
Typical shaft seal nitrogen flow 4 slm
Inlet connection ISO100
Outlet connection NW40
Typical cooling water flow at 15 psi pressure drop     240 l h-1
  4 l min-1
Weight 415 kg
Power input at ultimate 3.4 kW
Rated motor power 6.1 kW
Oil capacity 1.43 l

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Edwards iH600 Semiconductor Dry Vacuum Pump - REBUILT

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A59020945 / A590-20-945  iH600 Mark V  208V 50/60Hz 3-phase
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A53382945 / A533-82-945  iH600 Enhanced System  208V 60Hz
A53382946 / A533-82-946  iH600  380/415V 50Hz
A53386945 / A533-86-945  iH600 Enhanced System  208V 60Hz
A53386946 / A533-86-946  iH600 Enhanced System  380/415V 50Hz
A53341945 / A533-41-945  iH600 HEAC  208V 60Hz
A53341946 / A533-41-946  iH600 HEAC  380/415V 50Hz
A53351945 / A533-51-945  iH600 New Look  208V 60Hz
A53351946 / A533-51-946  iH600 New Look  380/415V 50Hz
A53351908 / A533-51-908  iH600 New Look  460V 60Hz
NGV667000 / NGV6-67-000  iH600 HEAC  w/ interlock 208V
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A53358945 / A533-58-945  iH600F  200-208V 50/60Hz