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Edwards iH80 - NEW

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Edwards iH80 - NEW
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Edwards iH80 - NEW

Edwards iH80 Semiconductor Dry Vacuum Pump - NEW

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.

The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Peak speed 103 m3h-1
61 cfm
1,717 lmin-1
Ultimate vacuum 1 x 10-2 mbar
7.5 x 10-3 Torr
1 Pa
Typical shaft seal nitrogen flow 4 slm
Inlet connection ISO63
Outlet connection NW40
Typical cooling water flow at 15 psi pressure drop     120 lh-1
2 lmin-1
Weight 240 kg
Power input at ultimate 2.7 kW
Rated motor power 3.5 kW
Oil capacity 0.7 l


All figures are typical without gas ballast.


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Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Edwards iH80 Semiconductor Dry Vacuum Pump - NEW

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