Home > Vacuum Pumps > Dry > Edwards > iH - NEW > Edwards iH80 Dry Vacuum Pump - NEW

Edwards iH80 Dry Vacuum Pump - NEW

Request for Quote

To request a quote, click the button below and fill out the form.

RFQ

Manufacturer Part Number: A59000908
Edwards iH80 Dry Vacuum Pump - NEW
Click Image to Enlarge

Edwards iH80 Semiconductor Dry Vacuum Pump - NEW

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.

The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Peak speed 103 m3h-1
61 cfm
1,717 lmin-1
Ultimate vacuum 1 x 10-2 mbar
7.5 x 10-3 Torr
1 Pa
Typical shaft seal nitrogen flow 4 slm
Inlet connection ISO63
Outlet connection NW40
Typical cooling water flow at 15 psi pressure drop     120 lh-1
2 lmin-1
Weight 240 kg
Power input at ultimate 2.7 kW
Rated motor power 3.5 kW
Oil capacity 0.7 l

 

All figures are typical without gas ballast.

Specs

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Edwards iH80 Semiconductor Dry Vacuum Pump - NEW

A59000908 / A590-00-908  iH80  MK5 460V 60Hz three-phase
A59000945 / A590-00-945  iH80  MK5 200/208V 50/60Hz 3-phase
A59000946 / A590-00-946  iH80  MK5 380/415V 50Hz 3-phase
A59000957 / A590-00-957  iH80  MK5 230V 60Hz 3-phase