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Edwards iH80 Dry Vacuum Pump - REBUILT

Manufacturer Part Number: A590-00-945
Price: $15,000.00
Edwards iH80 Dry Vacuum Pump - REBUILT
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Just in! Edwards iH80 Dry Vacuum Pump: MK5 A590-00-945.

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership. 

The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

  50 Hz 60 Hz
Peak speed 86 m3h-1 103 m3h-1
  51 cfm 61 cfm
  1,433 l min-1 1,717 l min-1
Ultimate vacuum 3 x 10-2 mbar 1 x 10-2 mbar
  2.3 x 10-2 Torr 7.5 x 10-3 Torr
  3 Pa 1 Pa
Typical shaft seal nitrogen flow 4 slm 4 slm
Inlet connection ISO63 ISO63
Outlet connection NW40 NW40
Typical cooling water flow at 15 psi pressure drop     120 l h-1 120 l h-1
  2 l min-1 2 l min-1
Weight 240 kg 240 kg
Power input at ultimate 2.4 kW 2.7 kW
Rated motor power 2.9 kW 3.5 kW
Oil capacity 0.7 l 0.7 l

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Edwards iH80 Dry Vacuum Pump - REBUILT

iH80 Dry Pump 460V, 60 Hz 3Ø
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iH80 Dry Pump 200/208V, 50/60 Hz 3Ø
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iH80 Dry Pump 380/415V, 50 Hz 3Ø
A59000946 A590-00-946

iH80 Dry Pump 230V, 60 Hz 3Ø
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iH80 Dry Pump 208V 60Hz
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iH80 Enhanced 208V 60Hz
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iH80 HEAC 208V 60Hz
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iH80 New Look 208V 60Hz
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iH80 Mark V 208V 60Hz
A59010945 A590-10-945

iH80 Dry Pump 380/415V 50Hz
A53381946 A533-81-946

iH80 Enhanced 380/415V 50Hz
A53385946 A533-85-946

iH80 HEAC 380/415V 50Hz
A53340946 A533-40-946

iH80 New Look 380/415V 50Hz
A53350946 A533-50-946

iH80 Mark V 380/415V 50Hz
A59010946 A590-10-946

iH80 Mark V 460V 
A590-00-908 A59000908

iH Mark V 200V
A590-00-945 A59000945

iH Mark V 460V
A590-00-908 A59000908

iH Mark V 360V
A590-00-945 A59000945

iH Mark V 460V
A590-00-908 A59000908

iH Mark V 460V
A590-00-908 A59000908

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