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Edwards iL70 Dry Vacuum Pump - REBUILT

Manufacturer Part Number: A533-53-945
Price: $9,775.00
Quantity:
Edwards iL70 Dry Vacuum Pump - REBUILT
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Edwards iL70 Dry Vacuum Pump - REBUILT

The iL70 Series Dry pumps have been specifically designed to provide reliable operation over a wide range of applications. These Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership. The iL70 Series operate under the most arduous conditions in the world?fs top wafer fab manufacturing plants and have been proven to require zero periodic maintenance. The iL70 series provide applications specific to the semiconductor fabrication processes. The iL70 Dry Vacuum Pumps are ideally suited to loadlock, transfer chamber, PVD, SEM and similar duties. The iL70 system has an LCDP70 dry pump and enclosed water cooled motors. This system is fully enclosed, and includes seismic restraints. A PDT, available as an accessory, enables you to manually operate the iL system and to display its status.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Peak Speed
    50 Hz 70 m3h1 / 41 cfm
    60 Hz 84 m3h1 / 49 cfm
Ultimate vacuum
    60 Hz 2.3 x 10-2 Torr / 3 x 10-2 mbar
    50 Hz 3.8 x 10-2 Torr / 5 x 10-2 mbar
Typical Shaft Seal 0
Inlet connection ISO63
Outlet Connection NW40
Typical cooling water flow (15 psi)     90 1 h-1 / 1.5 1 min-1
Weight 230 kg / 506 lbs
Power input
    60 Hz 1.5 kW
    50 Hz 1.3 kW
Rated motor
    60 Hz 2.2 kW
    50 Hz 1.8 kW
Oil capacity .75 liter

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Edwards iL70 New Look 200-208V 50/60Hz Dry Vacuum Pump - REBUILT

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