Edwards iQDP40 Dry Vacuum Pump - REBUILT
Edwards iQDP40 Semiconductor Dry Vacuum Pump - REBUILT
Rebuilt with a one year warranty. Sound enclosure panels, various nitrogen purge configurations and other features can be provided per quote.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Specifications | iQDP40 / QDP40 / DP40 | iQDP80 / QDP80 / DP80 |
|---|---|---|
| 60 Hz | ||
| Peak speed | ||
| m3h-1 | 55 | 96 |
| cfm | 32 | 56.4 |
| Displacement | ||
| m3h-1 | 62 | 110 |
| cfm | 36.7 | 64.7 |
| Ultimate vacuum | ||
| mbar | 3 x 10-2 | 1 x 10-2 |
| Torr | 2 x 10-2 | 8 x 10-3 |
| Inlet connection | ISO 40 bolted | ISO 63 bolted |
| Outlet connection | NW 40 | NW 40 |
| Power input @ vacuum (kW) | 1.3 | 3.1 |
| Motor power (kW) | 2.2 | 4.0 |
| Weight (kg) | 186 | 216 |
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TIM Tool interface and communications modules (iH/iL series) for enhanced control through the process tool and connection to PC-based Fabworks software which monitors and logs data from up to 1,000 devices including pumps and exhaust management systems; and a pump display module for monitoring and manual operation of the iL series. Edwards has also developed the TIM Tool Interface Module to connect semiconductor dry pump systems to all existing and new semiconductor tools.
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Edwards iQDP40 Semiconductor Dry Vacuum Pump - REBUILT
A53240905 A532-40-905
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