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Edwards iXH1210H Dry Vacuum Pump - REBUILT

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Manufacturer Part Number: AC3A0612220
Edwards iXH1210H Dry Vacuum Pump - REBUILT
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Edwards iXH1210H Semiconductor Dry Vacuum Pump - REBUILT

Features include:

  • More process capability
  • Greatly increased powder handling capability and innova ve Gas BusterTM technology
  • Wide temperature range allows optimisation of pump to minimise by-product accumulation from condensation
  • Innovative pump seal technology to lengthen process life and reduce leakage risks
  • High capacity dry pumps and boosters give an expanded process window to enhance yields
  • Reduced cost of ownership
  • 10% less energy consump on than the previous model
  • SEMI® E54 compatible and Green Mode capable
  • Longer overhaul intervals and less unscheduled down me
  • Complies with key interna onal standards including UL, CE and S2
  • Greatly increased hydrogen pumping speed for advanced EPI and solar processes
  • Smaller footprint and lower height for ease of fi ng in any fab

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Dry pump size 100 m3/h
Booster size 1,200 m3/h
Peak speed 1,065 m3/h
Ultimate vac (typical)     3.7 x 10-3 Torr
System power at ult. 3.9 kW
Inlet connection ISO 100
Outlet connection NW 40
Typical water flow 4.2 l/m
Purge flow range 22/44/60 slm
Weight 413 kg

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Edwards iXH1210H Semiconductor Dry Vacuum Pump 480V - REBUILT

AC310A121200  iXH1210  200-230V 50/60Hz (MM44)