Edwards iXH3030 - REBUILT
Edwards iXH3030 Semiconductor Dry Vacuum Pump - REBUILT
The iXH dry pump range has been developed to meet the demanding requirements for process pumping solutions in the Semiconductor, Flat Panel and Solar industries. The range sets new standards for harsh process capability, reliability and reduced cost of ownership in low footprint packages.
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Edwards MODEL iXH3030 Semiconductor Dry Vacuum Pump - REBUILT CODE No. AC530xy22300 200-230V CODE No. ACF30xy22300 380-460V Where x = 1, 2, 3, 4, 5, 6, 7, 8, 9, A, B, C or D depending on gas module type Where y = 1 means 'no check valve' and y = 3 means 'check valve supplied'