Edwards STP-A1303C - REBUILT
Edwards Seiko Seiki STP-A1303C Turbomolecular Vacuum Pump - REBUILT
Edwards STP-A1303C is a turbomolecular pump designed for use in semiconductor applications. Edwards advanced rotor technology gives class-leading performance for maximum process flexibility. The STP-A1303C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Technology
- Higher gas throughput
- Maximized process flexibility
- Oil free
- Low vibration
- High reliability
- Maintenance free
- Harsh process compatible
- Increased life
Advanced Controller Design
- Auto tuning
- Self diagnostic functions
- DC motor drive
- Battery-free operation
- Small footprint
- Half rack controller
An STP pump can be installed in any orientation and operate by remote control. If any rotor imbalance occurs (by deposition of process by-products, for example) sensors detect changes in its motion and compensate the magnetic fields accordingly. There are backup precision mechanical bearings to protect the pump in the event of a total disruption of magnetic suspension or a sudden massive air inrush that overcomes the magnetic bearing stiffness.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
|Water cooling fitting||PT1/4|
|Ultimate pressure w/ bake out heating||10-7 Pa (10-9 Torr)|
|Max. continuous outlet pressure||270 Pa (2 Torr)|
|Max. nitrogen throughput||1,500 sccm|
|Rated speed||35,500 rpm|
|Starting time||7 min|
|Max inlet flange temperature||120°C|
|Input voltage||200 to 240 VAC|
|Power consumption||0.85 kVA|
BOC Edwards STP Series Generic Instruction Manual
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Edwards Seiko Seiki STP-A1303C Turbomolecular Vacuum Pump - REBUILT P/N B718-02-020 / B71802020 STP-A1303C ISO-200F P/N YT36-B0-030 / YT36B0030 STP-A1303C DN 200 CF P/N YT36-26-005 / YT3626005 STP-A1303C ISO-200F TMS YT36-26-004 / YT3626004 STP-A1303C DN 200 CF TMS YT36-B0-100 / YT36B0100 STP-A1303CV ISO-200F w/ heater band