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Edwards STP-A1303C - REBUILT

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Edwards STP-A1303C - REBUILT
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Edwards STP-A1303C - REBUILT

Edwards Seiko Seiki STP-A1303C Turbomolecular Vacuum Pump - REBUILT

Edwards STP-A1303C is a turbomolecular pump designed for use in semiconductor applications. Edwards advanced rotor technology gives class-leading performance for maximum process flexibility. The STP-A1303C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Advanced Rotor Technology

  • Higher gas throughput
  • Maximized process flexibility
  • Oil free
  • Low vibration
  • High reliability
  • Maintenance free
  • Harsh process compatible
  • Increased life

Advanced Controller Design

  • Auto tuning
  • Self diagnostic functions
  • DC motor drive
  • Battery-free operation

Compact Design

  • Small footprint
  • Half rack controller

An STP pump can be installed in any orientation and operate by remote control. If any rotor imbalance occurs (by deposition of process by-products, for example) sensors detect changes in its motion and compensate the magnetic fields accordingly. There are backup precision mechanical bearings to protect the pump in the event of a total disruption of magnetic suspension or a sudden massive air inrush that overcomes the magnetic bearing stiffness.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inlet flange ISO-200F
Outlet port KF-40
Purge port KF-10
Water cooling fitting PT1/4
Pumping speed
    N2 1,300 l/s-1
    H2 800 l/s-1
Compression ratio
    N2 > 108
    H2 103
Ultimate pressure w/ bake out heating     10-7 Pa (10-9 Torr)
Max. continuous outlet pressure 270 Pa (2 Torr)
Max. nitrogen throughput 1,500 sccm
Rated speed 35,500 rpm
Starting time 7 min
Max inlet flange temperature 120°C
Input voltage 200 to 240 VAC
Power consumption 0.85 kVA
Weight 39 kg

BOC Edwards STP Series Generic Instruction Manual

Digital Manual

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Edwards Seiko Seiki STP-A1303C Turbomolecular Vacuum Pump - REBUILT

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