Edwards STP-A1603C Turbo Vacuum Pump - REBUILT
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Edwards Seiko Seiki STP-A1603C Turbomolecular Vacuum Pump - REBUILT
The small and powerful Edwards STP-A1603C turbo-molecular pump has been designed using Edwards advanced rotor technology. This provides high throughput, maximum reliability and class leading performance which is demanded by the latest generation of semiconductor processes. Its half rack controller and compact design provide considerable space saving, whilst its advanced deposition reduction system gives improved reliability and performance. The STPA1603C has been qualified on the latest 200 mm etch tools as well as on new generation 300 mm oxide etch processes.
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|Water cooling fitting||PT1/4|
|H2||> 7 x 103|
|Ultimate pressure with bake out heating||10-7 Pa (10-9 Torr order)|
|Max allowable backing pressure||266 Pa|
|Max Nitrogen throughput||2,500 sccm|
|Rated speed||36,500 rpm|
|Starting time||7 min|
|Water cooling flow||2 lmin-1|
|Recommended purge gas flow||20 - 50 sccm|
|Input voltage||200 to 240 (± 10) V a.c.|
|Power consumption||0.85 kVA|
|Pump weight||35 kg|
|Controller weight||9 kg|
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Edwards Seiko Seiki STP-A1603C Turbomolecular Vacuum Pump - REBUILT STP-A1603P ISO200F INLET B75100010 STP-A1603P DN200CF INLET B75100100 STP-A1603CV TMS ISO200F INLET YT4616004 STP-A1603CV TMS DN200CF INLET YT4616005
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