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Edwards STP-A1603C - REBUILT

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Manufacturer Part Number: B751-00-010
Edwards STP-A1603C - REBUILT
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Edwards STP-A1603C - REBUILT

Edwards Seiko Seiki STP-A1603C Turbomolecular Vacuum Pump - REBUILT

The small and powerful Edwards STP-A1603C turbomolecular pump has been designed using Edwards advanced rotor technology. This provides high throughput, maximum reliability and class leading performance which is demanded by the latest generation of semiconductor processes. Its half rack controller and compact design provide considerable space saving, whilst its advanced deposition reduction system gives improved reliability and performance. The STP-A1603C has been qualified on the latest 200 mm etch tools as well as on new generation 300 mm oxide etch processes.

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Inlet flange ISO-200F / VG200 / ICF253
Outlet port KF-40
Purge port KF-10
Water cooling fitting PT1/4
Pumping Speed  
    N2 1,600 l/s-1
    H2 1,200 l/s-1
Compression ratio  
    N2 > 108
    H2 > 7 x 103
Ultimate pressure with bake out heating     10-7 Pa (10-9 Torr)
Max allowable backing pressure 266 Pa (2 Torr)
Max Nitrogen throughput 2,500 sccm
Rated speed 36,500 rpm
Starting time 7 min
Mounting position Any
Water cooling flow 2 l/min-1
Temperature 5 - 25°C
Pressure 0.3 MPa
Recommended purge gas flow 20 - 50 sccm
Input voltage 200 to 240 (± 10) VAC 
Power consumption 0.85 kVA
Pump weight 35 kg
Controller weight 9 kg

BOC Edwards STP-A1603 Series Instruction Manual

Digital Manual

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Edwards Seiko Seiki STP-A1603C Turbomolecular Vacuum Pump - REBUILT

P/N YT46-0Z-030 / YT460Z030  STP-A1603C ISO-250F
P/N B751-00-010 / B75100010  STP-A1603P  ISO-200F
P/N B751-00-100 / B75100100  STP-A1603P  DN 200 CF
    PT46-5Z-000 / PT465Z000  STP-A1603P
    PT46-5Z-100 / PT465Z100  STP-A1603P
    YT46-16-004 / YT4616004  STP-A1603CV  ISO-200F TMS
    YT46-16-005 / YT4616005  STP-A1603CV  DN 200 CF TMS