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Edwards Seiko Seiki STP-A1603C Turbo Vacuum Pump - REBUILT

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Manufacturer Part Number: B75100010
Edwards Seiko Seiki STP-A1603C Turbo Vacuum Pump - REBUILT
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Edwards Seiko Seiki STP-A1603C Turbomolecular Vacuum Pump - REBUILT

The small and powerful Edwards STP-A1603C turbo-molecular pump has been designed using Edwards advanced rotor technology. This provides high throughput, maximum reliability and class leading performance which is demanded by the latest generation of semiconductor processes. Its half rack controller and compact design provide considerable space saving, whilst its advanced deposition reduction system gives improved reliability and performance. The STPA1603C has been qualified on the latest 200 mm etch tools as well as on new generation 300 mm oxide etch processes.

Inlet flange ISO200F
Outlet port  KF40
Purge port KF10
Water cooling fitting PT1/4
Pumping Speed  
  N2 1,600 ls-1
  H2 1,200 ls-1
Compression ratio  
  N2 > 108
  H2 > 7 x 103
Ultimate pressure with bake out heating 10-7 Pa (10-9 Torr order)
Max allowable backing pressure 266 Pa 
  (2 Torr)
Max Nitrogen throughput 2,500 sccm
Rated speed 36,500 rpm
Starting time 7 min
Mounting position Any
Water cooling flow 2 lmin-1
Temperature 5-25°C
Pressure 0.3 MPa
Recommended purge gas flow 20 - 50 sccm
Input voltage 200 to 240 (± 10) V a.c. 
Power consumption 0.85 kVA
Pump weight 35 kg
Controller weight 9 kg
 

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Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Edwards Seiko Seiki STP-A1603C Turbomolecular Vacuum Pump - REBUILT

STP-A1603P

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