Edwards STP-A2203PV - REBUILT
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Edwards Seiko Seiki STP-A2203PV Turbomolecular Vacuum Pump - REBUILT
An STP pump can be installed in any orientation and operate by remote control. If any rotor imbalance occurs (by deposition of process by-products, for example) sensors detect changes in its motion and compensate the magnetic fields accordingly. There are backup precision mechanical bearings to protect the pump in the event of a total disruption of magnetic suspension or a sudden massive air inrush that overcomes the magnetic bearing stiffness.
Model names ending in a C are corrosion-resistant, with nickel-coated rotors and stators and a nitrogen purge port. Ones with a prefix of H or A are high throughput pumps incorporating a hybrid pumping mechanism for higher gas flow. These are optimized for processes such as plasma etch.
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|Water cooling fitting||PT1/4|
|H2||> 2.5 x 104|
|Ultimate pressure||10-6 Pa (10-8 Torr)|
|Maximum allowable backing pressure||400 Pa (3 Torr)|
|Maximum nitrogen throughput||1,500 sccm|
|Rated speed||27,000 rpm|
|Starting time||7 min|
|Water cooling flow||2 l/min-1|
|Water cooling temperature||5 - 25°C|
|Recommended purge gas flow||20 sccm|
|Input voltage||200 to 240 (± 10) VAC|
|Power consumption||1.5 kVA|
|Pump weight||61 kg|
|Controller weight||11 kg|
BOC Edwards STP Series Generic Instruction Manual
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Edwards Seiko Seiki STP-A2203PV Turbomolecular Vacuum Pump - REBUILT P/N B750-01-000 / B75001000 STP-A2203PV M483820 0000040934