Edwards STP-A2203PV - REBUILT
Edwards Seiko Seiki STP-A2203PV Turbomolecular Vacuum Pump - REBUILT
An STP pump can be installed in any orientation and operate by remote control. If any rotor imbalance occurs (by deposition of process by-products, for example) sensors detect changes in its motion and compensate the magnetic fields accordingly. There are backup precision mechanical bearings to protect the pump in the event of a total disruption of magnetic suspension or a sudden massive air inrush that overcomes the magnetic bearing stiffness.
Model names ending in a C are corrosion-resistant, with nickel-coated rotors and stators and a nitrogen purge port. Ones with a prefix of H or A are high throughput pumps incorporating a hybrid pumping mechanism for higher gas flow. These are optimized for processes such as plasma etch.
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| Inlet flange | ISO-250F |
| Outlet port | KF-40 |
| Purge port | KF-10 |
| Water cooling fitting | PT1/4 |
| Pumping speed | |
| N2 | 2,200 l/s-1 |
| H2 | 1,700 l/s-1 |
| Compression ratio | |
| N2 | > 108 |
| H2 | > 2.5 x 104 |
| Ultimate pressure | 10-6 Pa (10-8 Torr) |
| Maximum allowable backing pressure | 400 Pa (3 Torr) |
| Maximum nitrogen throughput | 1,500 sccm |
| Rated speed | 27,000 rpm |
| Starting time | 7 min |
| Mounting position | Any |
| Water cooling flow | 2 l/min-1 |
| Water cooling temperature | 5 - 25°C |
| Pressure | 0.3 MPa |
| Recommended purge gas flow | 20 sccm |
| Input voltage | 200 to 240 (± 10) VAC |
| Power consumption | 1.5 kVA |
| Pump weight | 61 kg |
| Controller weight | 11 kg |
BOC Edwards STP Series Generic Instruction Manual
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Edwards Seiko Seiki STP-A2203PV Turbomolecular Vacuum Pump - REBUILT P/N B750-01-000 / B75001000 STP-A2203PV M483820 0000040934
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