Edwards STP-A2203PV - REBUILT
Edwards Seiko Seiki STP-A2203PV Turbomolecular Vacuum Pump - REBUILT
An STP pump can be installed in any orientation and operate by remote control. If any rotor imbalance occurs (by deposition of process by-products, for example) sensors detect changes in its motion and compensate the magnetic fields accordingly. There are backup precision mechanical bearings to protect the pump in the event of a total disruption of magnetic suspension or a sudden massive air inrush that overcomes the magnetic bearing stiffness.
Model names ending in a C are corrosion-resistant, with nickel-coated rotors and stators and a nitrogen purge port. Ones with a prefix of H or A are high throughput pumps incorporating a hybrid pumping mechanism for higher gas flow. These are optimized for processes such as plasma etch.
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Inlet flange | ISO-250F |
Outlet port | KF-40 |
Purge port | KF-10 |
Water cooling fitting | PT1/4 |
Pumping speed | |
N2 | 2,200 l/s-1 |
H2 | 1,700 l/s-1 |
Compression ratio | |
N2 | > 108 |
H2 | > 2.5 x 104 |
Ultimate pressure | 10-6 Pa (10-8 Torr) |
Maximum allowable backing pressure | 400 Pa (3 Torr) |
Maximum nitrogen throughput | 1,500 sccm |
Rated speed | 27,000 rpm |
Starting time | 7 min |
Mounting position | Any |
Water cooling flow | 2 l/min-1 |
Water cooling temperature | 5 - 25°C |
Pressure | 0.3 MPa |
Recommended purge gas flow | 20 sccm |
Input voltage | 200 to 240 (± 10) VAC |
Power consumption | 1.5 kVA |
Pump weight | 61 kg |
Controller weight | 11 kg |
BOC Edwards STP Series Generic Instruction Manual
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Edwards Seiko Seiki STP-A2203PV Turbomolecular Vacuum Pump - REBUILT P/N B750-01-000 / B75001000 STP-A2203PV M483820 0000040934