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Edwards STP-A3003CV - REBUILT

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Edwards STP-A3003CV - REBUILT
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Edwards STP-A3003CV - REBUILT

Edwards Seiko Seiki STP-A3003CV Turbomolecular Vacuum Pump - REBUILT

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Inlet flange VG-300 / VG-350 / ISO-320F
Outlet flange KF-40
Pumping speed
    N2 (l/s) 3,000
    H2 (l/s) 1,800
Compression ratio
    N2 > 108
    H2 6 x 103
Ultimate pressure / Pa (Torr) 10-6 (10-8) order [after baking]
Maximum gas flow-rate  
    N2 Pa.m3/s (SCCM) 3.0 (1,800) water cooling, 1.5 (900) TMS unit is used (60°C)
    Ar Pa.m3/s (SCCM) 1.5 (900) water cooling, 1.0 (600) TMS unit is used (60°C)
Allowable backing pressure / Pa (Torr) 333 (2.5) water cooling / TMS unit used
Flow rate of purge gas / N2 Pa.m3/s (SCCM)     3.4 x 10-2 (20)
Rated speed 27,000 rpm
Backup rotational speed Approximately 6,000 rpm
Starting time 9 min with SCU-1500 / SCU-1600, 10 min with SCU-1400
Stopping time 9 min with SCU-1500 / SCU-1600, 11 min with SCU-1400
Noise < 50 db (at 27,000 rpm)
Temperature Management System (TMS) Available
Baking temperature < 120°C
Lubricating oil Not necessary
Installation position Free
Cooling method Water cooling
Recommended backing-pump > 1,300 l/min
Mass 72 kg
Ambient temperature range 0 to 40°C
Storage temperature range -25 to 55°C
Applicable control unit SCU-1400 / SCU-1500 / SCU-1600

BOC Edwards STP-A2503/A3003 Series Instruction Manual

Digital Manual

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Edwards Seiko Seiki STP-A3003CV Turbomolecular Vacuum Pump - REBUILT