Edwards STP-A803C - REBUILT
Edwards Seiko Seiki STP-A803C Turbomolecular Vacuum Pump - REBUILT
Edwards STP-A803C turbomolecular pump is designed for use in semiconductor applications. Edwards advanced rotor technology gives class-leading performance for maximum process flexibility. The STP-A803C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Technology
- Maximized process flexibility
- Oil free
- Low vibration
- High reliability
- Maintenance free
- Harsh process compatible
- Increased life
Advanced Controller Design
- Auto tuning
- Self diagnostic functions
- DC motor drive
- Battery-free operation
Compact Design
- Small footprint
- Half rack controller
An STP pump can be installed in any orientation and operate by remote control. If any rotor imbalance occurs (by deposition of process by-products, for example) sensors detect changes in its motion and compensate the magnetic fields accordingly. There are backup precision mechanical bearings to protect the pump in the event of a total disruption of magnetic suspension or a sudden massive air inrush that overcomes the magnetic bearing stiffness.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Inlet flange | ISO-160F |
| Outlet port | KF-40 |
| Purge port | KF-10 |
| Water cooling fitting | PT1/4 |
| Pumping speed | |
| N2 | 800 l/s-1 |
| H2 | 520 l/s-1 |
| Compression ratio | |
| N2 | >108 |
| H2 | 103 |
| Ultimate pressure w/ bake out heating | 10-7 Pa (10-9 Torr) |
| Max. continuous outlet pressure | 270 Pa (2 Torr) |
| Max. nitrogen throughput | 1,500 sccm |
| Rated speed | 32,500 rpm |
| Starting time | 7 min |
| Max inlet flange temperature | 120°C |
| Input voltage | 200 to 240 |
| Power consumption | 0.85 kVA |
| Weight | 9 kg |
BOC Edwards STP Series Generic Instruction Manual
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Edwards Seiko Seiki STP-A803C Turbomolecular Vacuum Pump - REBUILT
P/N YT36-B0-040 / YT36B0040 STP-A803C ISO-160F
P/N YT36-B0-010 / YT36B0010 STP-A803C DN 160 CF
P/N YT36-26-000 / YT3626000 STP-A803CV ISO-160F TMS
YT36-26-003 / YT3626003 STP-A803CV DN 160 CF TMS
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