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Edwards STP-A803C - REBUILT

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Manufacturer Part Number: YT36-B0-040
Edwards STP-A803C - REBUILT
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Edwards STP-A803C - REBUILT

Edwards Seiko Seiki STP-A803C Turbomolecular Vacuum Pump - REBUILT

Edwards STP-A803C turbomolecular pump is designed for use in semiconductor applications. Edwards advanced rotor technology gives class-leading performance for maximum process flexibility. The STP-A803C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Advanced Rotor Technology

  • Maximized process flexibility
  • Oil free
  • Low vibration
  • High reliability
  • Maintenance free
  • Harsh process compatible
  • Increased life

Advanced Controller Design

  • Auto tuning
  • Self diagnostic functions
  • DC motor drive
  • Battery-free operation

Compact Design

  • Small footprint
  • Half rack controller

An STP pump can be installed in any orientation and operate by remote control. If any rotor imbalance occurs (by deposition of process by-products, for example) sensors detect changes in its motion and compensate the magnetic fields accordingly. There are backup precision mechanical bearings to protect the pump in the event of a total disruption of magnetic suspension or a sudden massive air inrush that overcomes the magnetic bearing stiffness.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Edwards Seiko Seiki STP-A803C

Inlet flange ISO-160F
Outlet port KF-40
Purge port KF-10
Water cooling fitting PT1/4
Pumping speed
    N2 800 l/s-1
    H2 520 l/s-1
Compression ratio
    N2 >108
    H2 103
Ultimate pressure w/ bake out heating     10-7 Pa (10-9 Torr)
Max. continuous outlet pressure 270 Pa (2 Torr)
Max. nitrogen throughput 1,500 sccm
Rated speed 32,500 rpm
Starting time 7 min
Max inlet flange temperature 120°C
Input voltage 200 to 240
Power consumption 0.85 kVA
Weight 9 kg

BOC Edwards STP Series Generic Instruction Manual

Digital Manual

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Edwards Seiko Seiki STP-A803C Turbomolecular Vacuum Pump - REBUILT

P/N YT36-B0-040 / YT36B0040  STP-A803C  ISO-160F
P/N YT36-B0-010 / YT36B0010  STP-A803C  DN 160 CF
P/N YT36-26-000 / YT3626000  STP-A803CV  ISO-160F TMS
    YT36-26-003 / YT3626003  STP-A803CV  DN 160 CF TMS