Edwards STP-H451C - REBUILT
Edwards STP-H451C Turbomolecular Vacuum Pump - REBUILT
Edwards high performance STP-H451C turbomolecular pump has been designed for use in the harshest of semiconductor applications. The pumps field proven reliability and class-leading performance give maximum process flexibility. The STP-H451C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Technology
- Higher gas throughput
- Maximized process flexibility
- Oil free
- Low vibration
- High reliability
- Maintenance free
- Harsh process compatible
- Increased life
Advanced Controller Design
- Auto tuning
- Self diagnostic functions
- DC motor drive
- Battery-free operation
Compact Design
- Small footprint
- Half rack controller
5 Axis Magnetic Suspension System
- Zero contamination
- Low maintenance
- Any orientation operation
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
Inlet flange | ISO-160K |
Outlet port | KF-40 |
Purge port | KF-10 |
Water cooling fitting | PT1/4 |
Pumping speed | |
N2 | 450 l/s-1 |
H2 | 300 l/s-1 |
Compression ratio | |
N2 | > 108 |
H2 | 103 |
Ultimate pressure w/ bake out heating | 10-7 Pa (10-9 Torr) |
Max. continuous outlet pressure | 665 Pa (5 Torr) |
Max. nitrogen throughput | 2,500 sccm |
Rated speed | 48,000 rpm |
Starting time | 4 min |
Max inlet flange temperature | 120°C |
Input voltage | 100 to 120 |
Power consumption | 0.6 kVA |
Weight | 15 kg |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Edwards STP-H451C Turbomolecular Vacuum Pump - REBUILT P/N YT34-B0-090 / YT34B0090 STP-H451C ISO-160K P/N B719-01-001 / B71901001 STP-H451C ISO-160K P/N PT34-0Z-005 / PT340Z005 STP-H451C DN 160 CF YT34-16-007 / YT3416007 STP-H451CV ISO-160F TMS YT34-16-006 / YT3416006 STP-H451CV DN 160 CF TMS