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Edwards STP-XA2703Y - REBUILT

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Manufacturer Part Number: PT66-0Z-100
Edwards STP-XA2703Y - REBUILT
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Edwards STP-XA2703Y - REBUILT

Edwards Seiko Seiki STP-XA2703Y Turbomolecular Vacuum Pump - REBUILT

The STP-XA2703Y turbo pump offers high performance in the process range of high vacuum to 2,300 sccm process flow with enhanced throughput for all gases.

This pump is based on a new platform design offering features to improve thermal management, which enhances performance on harsh processes, increases the maximum process flow capability and reduces the effects of corrosion and deposition.

The outstanding performance is suited to both light and harsh applications, such as semiconductor etch, implant, lithography and LCD processes.

Advanced Rotor Design

  • Increased H2, N2 and Ar performance
  • Improved performance in the process pressure range of high vacuum to 2,300 sccm
  • Maintenance free

5-Axis Magnetic Suspension System

  • Zero contamination
  • Low vibration

Innovative Torque Management

  • Patented torque reduction mechanism

Optimized Temperature Management

  • High temperature TMS capability
  • Low deposition
  • Built-in cooling mechanism
  • Higher gas throughput heated and unheated
  • Optimized life
  • Harsh process compatible


  • SEMI® compliant, CE Marked and UL Listed

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

BOC Edwards STP Series Generic Instruction Manual

Digital Manual

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Edwards Seiko Seiki STP-XA2703Y Turbomolecular Vacuum Pump - REBUILT

P/N PT66-0Z-100 / PT660Z100  STP-XA2703Y  M885720