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Edwards STP-XA3203C Turbo Vacuum Pump - NEW

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RFQ

Manufacturer Part Number: YT660Z050
Edwards STP-XA3203C Turbo Vacuum Pump - NEW
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Edwards STP-XA3203C Turbomolecular Vacuum Pump - NEW

The STP-XA3203C turbo pump offers high performance in the process range of high vacuum to 2,300 sccm process flow with enhanced throughput for all gases.

This pump is based on a new platform design offering features to improve thermal management, which enhances performance on harsh processes, increases the maximum process flow capability and reduces the effects of corrosion and deposition.

The outstanding performance is suited to both light and harsh applications, such as semiconductor etch, implant, lithography and LCD processes.

Advanced Rotor Design

  • Increased H2, N2 and Ar performance
  • Improved performance in the process pressure range of high vacuum to 2,300 sccm
  • Maintenance free

5-Axis Magnetic Suspension System

  • Zero contamination
  • Low vibration

Innovative Torque Management

  • Patented torque reduction mechanism

Optimized Temperature Management

  • High temperature TMS capability
  • Low deposition
  • Built-in cooling mechanism
  • Higher gas throughput heated and unheated
  • Optimized life
  • Harsh process compatible

Certifications

  • SEMI® compliant, CE Marked and UL Listed

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inlet flange ISO-320F
Pumping speed
    N2 3,200 l/s-1
    H2 2,300 l/s-1
Compression ratio
    N2 > 108
    H2 > 6 x 103
Ult. pressure  10-7 Pa
Max. allowable backing pressure     266 Pa
Max. allowable gas flow
    N2 (water cooled) 2,300 sccm (3.8 Pam3s-1)
    Ar (water cooled) 1,900 sccm (3.2 Pam3s-1)
Rated speed 27,500 rpm
Starting time < 8 min
Mounting position Any
Water cooling
    Flow 3 l/min-1
    Pressure 0.3 MPa
Temperature 5 - 25°C
Recommended purge gas flow 50 sccm
Power consumption 1.5 kVA
Input voltage 200 to 240 VAC
Pump weight 80 kg

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Edwards STP-XA3203C Turbomolecular Vacuum Pump - NEW

YT660Z050 YT66-0Z-050  STP-XA3203C  ISO-320F
PT660Z080 PT66-0Z-080  STP-XA3203C  DN 320 CF
YT660Z150 YT66-0Z-150  STP-XA3203C  VG-300

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