Home > Vacuum Pumps > Turbo > Edwards > STP - NEW > Edwards STP-XA3203C Turbo Vacuum Pump - NEW
Email Link Tweet This Share on Facebook

Edwards STP-XA3203C Turbo Vacuum Pump - NEW

Request for Quote

To request a quote, click the button below and fill out the form.

RFQ

Manufacturer Part Number: YT660Z050
Edwards STP-XA3203C Turbo Vacuum Pump - NEW
Click Image to Enlarge

Edwards STP-XA3203C Turbomolecular Vacuum Pump - NEW

The STP-XA3203C turbo pump offers high performance in the process range of high vacuum to 2,300 sccm process flow with enhanced throughput for all gases.

This pump is based on a new platform design offering features to improve thermal management, which enhances performance on harsh processes, increases the maximum process flow capability and reduces the effects of corrosion and deposition.

The outstanding performance is suited to both light and harsh applications, such as semiconductor etch, implant, lithography and LCD processes.

Advanced Rotor Design

  • Increased H2, N2 and Ar performance
  • Improved performance in the process pressure range of high vacuum to 2,300 sccm
  • Maintenance free

5-Axis Magnetic Suspension System

  • Zero contamination
  • Low vibration

Innovative Torque Management

  • Patented torque reduction mechanism

Optimized Temperature Management

  • High temperature TMS capability
  • Low deposition
  • Built-in cooling mechanism
  • Higher gas throughput heated and unheated
  • Optimized life
  • Harsh process compatible

Certifications

  • SEMI® compliant, CE Marked and UL Listed

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inlet flange ISO320F
Pumping speed
N2 3200 l/s-1
H2 2300 l/s-1
Compression ratio
N2 >108
H2 >6 x 103
Ult. pressure  10-7 Pa
Max. allowable backing pressure 266 Pa
Max. allowable gas flow
N2 (water cooled) 2300 sccm 3.8 Pam3s-1
Ar (water cooled) 1900 sccm 3.2 Pam3s-1
Rated speed 27,500 rpm
Starting time 8 min>
Mounting position Any
Water cooling
Flow 3l/min-1
Pressure 0.3 MPa
Temperature 5-25 C
Recommended purge gas flow 50 sccm
Power consumption 1.5 kVA
Input voltage 200 to 240 V a.c.
Pump weight 80 kg

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Edwards STP-XA3203C Turbomolecular Vacuum Pump - NEW

STP-XA3203C ISO320F
Part no. YT660Z050, YT66-0Z-050

STP-XA3203C DN320CF
Part no. PT660Z080, PT66-0Z0-80

STP-XA3203C VG300
Part no. YT660Z150, YT66-0Z-150

Product Reviews

There are currently no customer reviews for this product.

Be the first to write a review!
We value your opinion. Please take a moment and share what you like or don't like about a product.

Write a review now