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Edwards STP-XA3203CV - REBUILT

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Manufacturer Part Number: PT66-16-020
Edwards STP-XA3203CV - REBUILT
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Edwards STP-XA3203CV - REBUILT

Edwards STP-XA3203CV Turbomolecular Vacuum Pump - REBUILT

An STP pump can be installed in any orientation and operate by remote control. If any rotor imbalance occurs (by deposition of process by-products, for example) sensors detect changes in its motion and compensate the magnetic fields accordingly. There are backup precision mechanical bearings to protect the pump in the event of a total disruption of magnetic suspension or a sudden massive air inrush that overcomes the magnetic bearing stiffness.

Model names ending in a C are corrosion-resistant, with nickel-coated rotors and stators and a nitrogen purge port. Ones with a prefix of H or A are high throughput pumps incorporating a hybrid pumping mechanism for higher gas flow. These are optimized for processes such as plasma etch. We also offer repair service.

TMS system

The Edwards Temperature Management System is available on a wide range of turbo pumps. It is designed to optimize the temperature within the pump, dramat­ically reducing the particle condensation within. This will not only considerably enhance the performance of the pump under harsh process conditions, but also increase its operational life.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inlet flange ISO-320F
Pumping speed
    N2 3,200 l/s-1
    H2 2,300 l/s-1
Compression ratio
    N2 > 108
    H2 > 6 x 103
Ultimate pressure  10-7 Pa
Max. allowable backing pressure     266 Pa
Max. allowable gas flow
    N2 (water cooled) 2,300 sccm 3.8 Pam3s-1
    Ar (water cooled) 1,900 sccm 3.2 Pam3s-1
Rated speed 27,500 rpm
Starting time < 8 min
Mounting position Any
Water cooling
Flow 3 l/min-1
Pressure 0.3 MPa
Temperature 5 - 25°C
Recommended purge gas flow 50 sccm
Power consumption 1.5 kVA
Input voltage 200 to 240 VAC
Pump weight 80 kg

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Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Edwards STP-XA3203CV Turbomolecular Vacuum Pump - REBUILT

P/N PT66-16-020 / PT6616020  STP-XA3203CV  M0J3690 ISO-320F KF-40 
P/N PT66-0Z-050 / PT660Z050  STP-XA3203C  M0B1620