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Edwards STP-XA4503C Turbo Vacuum Pump - NEW

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Manufacturer Part Number: YT670Z040
Edwards STP-XA4503C Turbo Vacuum Pump - NEW
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Edwards STP-XA4503C Turbomolecular Vacuum Pump - NEW

The STP-XA4503C magnetic bearing turbomolecular pump has a wide process window, from high vacuum, to high flow requirements with enhanced throughput for all gases.

This pump is based on a new design, offering features to improve thermal management, which enhances performance on harsh processes, increases the maximum process flow capability and reduces the effects of corrosion and deposition.

It has been designed to handle light and harsh duty applications, such as etch, implant, lithography and FPD processes.

Advanced Rotor Design

  • Increased Argon performance
  • Highest pumping speed in its class
  • Wide process window
  • Higher throughput at lower pressure
  • Maintenance free
  • Harsh process compatible

5-Axis Magnetic Suspension System

  • Zero contamination
  • Low vibration
  • High reliability

Optimized Temperature Distribution

  • Low deposition
  • Built-in cooling mechanism
  • Higher gas throughput
  • Increased operating life

Certifications

  • Conforms to international safety standards
  • UL listed, CE marked and SEMI® S2 compliant

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inlet flange VF-300 / ISO-320F / VG-350
Backing port KF-40
Pumping speed
    N2 3,800 l/s-1
    H2 2,500 l/s-1
Compression ratio
    N2 > 108
    H2 > 6 x 103
Ultimate pressure  10-7 Pa
Max. allowable backing pressure     266 Pa
Max. allowable gas flow
    N2 (water cooled) 2,800 sccm (4.73 Pam3s-1)
    Ar (water cooled) 2,150 sccm (3.63 Pam3s-1)
Rated speed 27,500 rpm
Starting time 12 min
Mounting position Any
Water cooling
Flow 3 l/min-1
Pressure 0.3 MPa
Temperature 5 - 25°C
Input voltage 200 to 240 VAC
Recommended purge gas flow 50 sccm
Input voltage 200 to 240 VAC
Max input power 1.5 KVA

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Edwards STP-XA4503C Turbomolecular Vacuum Pump - NEW

YT670Z040 YT67-0Z-040  STP-XA4503C  ISO-320F

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