Edwards STP-XA4503C - REBUILT
Edwards STP-XA4503C Turbomolecular Vacuum Pump - REBUILT
An STP pump can be installed in any orientation and operate by remote control. If any rotor imbalance occurs (by deposition of process by-products, for example) sensors detect changes in its motion and compensate the magnetic fields accordingly. There are backup precision mechanical bearings to protect the pump in the event of a total disruption of magnetic suspension or a sudden massive air inrush that overcomes the magnetic bearing stiffness.
Model names ending in a C are corrosion-resistant, with nickel-coated rotors and stators and a nitrogen purge port. Ones with a prefix of H or A are high throughput pumps incorporating a hybrid pumping mechanism for higher gas flow. These are optimized for processes such as plasma etch. We also offer repair service.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Inlet flange size | VF-300 / ISO-320F / VG-350 |
| Backing port size | KF-40 |
| Pumping speed | |
| N2 | 3,800 to 4,300 l/s-1 (dependant on model) |
| H2 | 2,500 l/s-1 |
| Compression ratio | |
| N2 | > 108 |
| H2 | 6 x 103 |
| Ultimate pressure | 10-7 Pa (10-9 Torr) |
| Max allowable backing pressure | 266 Pa (2 Torr) |
| Max allowable gas flow N2 (Water cooled only) |
2,800 sccm |
| 4.73 Pam3s-1 | |
| Maximum allowable gas flow Ar (Water cooled only) |
2,150 sccm |
| 3.63 Pam3s-1 | |
| Rated speed | 24,000 rpm |
| Run up time to 90% rated speed | 12 minutes |
| Mounting position | Any orientation |
| Water cooling | |
| Flow | 3 l/min-1 |
| Temperature | 5 - 25°C (41 - 77°F) |
| Pressure | 0.3 MPa |
| Recommended purge gas flow N2 | 50 sccm / 8.4 x 10-2 Pam3s-1 |
| Input voltage | 200 - 240 ±10 % VAC |
| Maximum input power (w/out TMS) | 1.5 KVA |
BOC Edwards STP Series Generic Instruction Manual
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Edwards STP-XA4503C Turbomolecular Vacuum Pump - REBUILT
P/N PT67-0Z-070 / PT670Z070
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