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Edwards STP-XA4503C - REBUILT

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Manufacturer Part Number: PT67-0Z-070
Edwards STP-XA4503C - REBUILT
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Edwards STP-XA4503C - REBUILT

Edwards STP-XA4503C Turbomolecular Vacuum Pump - REBUILT

An STP pump can be installed in any orientation and operate by remote control. If any rotor imbalance occurs (by deposition of process by-products, for example) sensors detect changes in its motion and compensate the magnetic fields accordingly. There are backup precision mechanical bearings to protect the pump in the event of a total disruption of magnetic suspension or a sudden massive air inrush that overcomes the magnetic bearing stiffness.

Model names ending in a C are corrosion-resistant, with nickel-coated rotors and stators and a nitrogen purge port. Ones with a prefix of H or A are high throughput pumps incorporating a hybrid pumping mechanism for higher gas flow. These are optimized for processes such as plasma etch. We also offer repair service.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inlet flange size VF-300 / ISO-320F / VG-350
Backing port size KF-40
Pumping speed  
    N2 3,800 to 4,300 l/s-1 (dependant on model)
    H2 2,500 l/s-1
Compression ratio  
    N2 > 108
    H2 6 x 103
Ultimate pressure 10-7 Pa (10-9 Torr)
Max allowable backing pressure 266 Pa (2 Torr)
Max allowable gas flow N2
(Water cooled only)
2,800 sccm
  4.73 Pam3s-1
Maximum allowable gas flow Ar
(Water cooled only)
2,150 sccm
  3.63 Pam3s-1
Rated speed 24,000 rpm
Run up time to 90% rated speed 12 minutes
Mounting position Any orientation
Water cooling  
    Flow 3 l/min-1
    Temperature 5 - 25°C (41 - 77°F)
    Pressure 0.3 MPa
Recommended purge gas flow N2 50 sccm / 8.4 x 10-2 Pam3s-1
Input voltage 200 - 240 ±10 % VAC
Maximum input power (w/out TMS)     1.5 KVA

BOC Edwards STP Series Generic Instruction Manual

Digital Manual

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Edwards STP-XA4503C Turbomolecular Vacuum Pump - REBUILT

P/N PT67-0Z-070 / PT670Z070