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Edwards Seiko Seiki STP-XA4503C Turbo Vacuum Pump - REBUILT

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Manufacturer Part Number: PT67-0Z-070
Edwards Seiko Seiki STP-XA4503C Turbo Vacuum Pump - REBUILT
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Edwards Seiko Seiki STP-XA4503C Turbomolecular Vacuum Pump - REBUILT

An STP pump can be installed in any orientation and operate by remote control. If any rotor imbalance occurs (by deposition of process by-products, for example) sensors detect changes in its motion and compensate the magnetic fields accordingly. There are backup precision mechanical bearings to protect the pump in the event of a total disruption of magnetic suspension or a sudden massive air inrush that overcomes the magnetic bearing stiffness.

Model names ending in a C are corrosion-resistant, with nickel-coated rotors and stators and a nitrogen purge port. Ones with a prefix of H or A are high throughput pumps incorporating a hybrid pumping mechanism for higher gas flow. These are optimized for processes such as plasma etch. We also offer repair service.

Inlet flange size VF300, ISO320F, VG350
Backing port size KF40
Pumping speed  
  N2 3,800 to 4,300 ls-1
  (dependant on model)
  H2 2,500 ls-1
Compression ratio  
  N2 > 108
  H2 6 x 103
Ultimate pressure 10-7 Pa / 10-9 Torr
Max allowable backing pressure 266 Pa / 2 Torr
Max allowable gas flow N2
(Water cooled only)
2,800 sccm 
  4.73 Pam3s-1
Maximum allowable gas flow Ar
(Water cooled only)
2,150 sccm 
  3.63 Pam3s-1
Rated speed 24,000 rpm
Run up time to 90% rated speed 12 minutes
Mounting position Any orientation
Water cooling  
  Flow 3 lmin-1
  Temperature 5 – 25°C / 41 – 77°F
  Pressure 0.3 MPa
Recommended purge gas flow N2 50 sccm / 8.4 x 10-2 Pam3s-1
Input voltage 200 – 240 ±10 % V a.c.
Maximum input power (without TMS) 1.5 KVA
 
 

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Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Edwards Seiko Seiki STP-XA4503C Turbomolecular Vacuum Pump - REBUILT

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