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Edwards STP1003 / C Turbo Vacuum Pump - NEW

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Manufacturer Part Number: YT39B0130
Edwards STP1003 / C Turbo Vacuum Pump - NEW
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Edwards STP1003 / C Turbomolecular Vacuum Pump - NEW

Edwards corrosion resistant STP1003C is a new turbomolecular pump for use in the most advanced of semiconductor applications. Edwards’s rotor technology gives class-leading performance for maximum process flexibility. This pump has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Advanced Rotor Technology

  • Maximized process flexibility
  • Oil free
  • Low vibration
  • High reliability
  • Maintenance free
  • Harsh process compatible (C version)
  • Increased life

Advanced Controller Design

  • Auto tuning
  • Self diagnostic functions
  • d.c. motor drive
  • Battery-free operation

Compact Design

  • Small footprint
  • Half rack controller

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inlet flange ISO200F
Outlet port KF40
Purge port KF10
Water cooling fitting PT1/4
Pumping speed
N2 1000 l/s-1
H2 800 l/s-1
Compression ratio
N2 >108
H2 105
Ult. pressure w/ bake out heating 10-7 Pa 10-9 Torr
Max. continuous outlet pressure 13 Pa 0.1 Torr
Max. nitrogen throughput 2500 sccm
Rated speed 35,000 rpm
Starting time 6 min
Max inlet flange temperature 120 C
Input voltage 100 to 120
Power consumption 0.8 kVA
Weight 31 kg

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Edwards STP1003 / C Turbomolecular Vacuum Pump - NEW

STP1003C ISO200F Inlet
Part no. YT39B0130, YT39-B0-130

STP1003 ISO200F Inlet
Part no. YT390Z001, YT39-0Z-001

STP1003C DN200CF Inlet
Part no. PT39AZ003, PT39-AZ-003

STP1003 DN200CF Inlet
Part no. YT39B0010, YT39-B0-010

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