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Edwards STP1003 / C - NEW

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Edwards STP1003 / C - NEW
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Edwards STP1003 / C - NEW

Edwards STP1003 / C Turbomolecular Vacuum Pump - NEW

Edwards corrosion resistant STP1003C is a new turbomolecular pump for use in the most advanced of semiconductor applications. Edwards’s rotor technology gives class-leading performance for maximum process flexibility. This pump has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Advanced Rotor Technology

  • Maximized process flexibility
  • Oil free
  • Low vibration
  • High reliability
  • Maintenance free
  • Harsh process compatible (C version)
  • Increased life

Advanced Controller Design

  • Auto tuning
  • Self diagnostic functions
  • DC motor drive
  • Battery-free operation

Compact Design

  • Small footprint
  • Half rack controller

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inlet flange ISO-200F
Outlet port KF-40
Purge port KF-10
Water cooling fitting PT1/4
Pumping speed
    N2 1,000 l/s-1
    H2 800 l/s-1
Compression ratio
    N2 > 108
    H2 105
Ultimate pressure w/ bake out heating     10-7 Pa (10-9 Torr)
Max. continuous outlet pressure 13 Pa (0.1 Torr)
Max. nitrogen throughput 2,500 sccm
Rated speed 35,000 rpm
Starting time 6 min
Max inlet flange temperature 120°C
Input voltage 100 to 120
Power consumption 0.8 kVA
Weight 31 kg

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Edwards STP1003 / C Turbomolecular Vacuum Pump - NEW

P/N YT39-0Z-001 / YT390Z001  STP1003  ISO-200F
P/N YT39-B0-010 / YT39B0010  STP1003  DN 200 CF
P/N YT39-B0-130 / YT39B0130  STP1003C  ISO-200F
    PT39-AZ-003 / PT39AZ003  STP1003C  DN 200 CF