Edwards STP1003 / C Turbo Vacuum Pump - NEW
Edwards STP1003 / C Turbomolecular Vacuum Pump - NEW
Edwards corrosion resistant STP1003C is a new turbomolecular pump for use in the most advanced of semiconductor applications. Edwards’s rotor technology gives class-leading performance for maximum process flexibility. This pump has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Technology
- Maximized process flexibility
- Oil free
- Low vibration
- High reliability
- Maintenance free
- Harsh process compatible (C version)
- Increased life
Advanced Controller Design
- Auto tuning
- Self diagnostic functions
- d.c. motor drive
- Battery-free operation
Compact Design
- Small footprint
- Half rack controller
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
Edwards STP1003 / C Turbomolecular Vacuum Pump - NEW
Part no. YT39B0130 - ISO200F Inlet
Part no. YT390Z001 - ISO200F Inlet
Part no. PT39AZ003 - DN200CF Inlet
| Inlet flange | ISO200F | |
| Outlet port | KF40 | |
| Purge port | KF10 | |
| Water cooling fitting | PT1/4 | |
| Pumping speed | ||
| N2 | 1000 l/s-1 | |
| H2 | 800 l/s-1 | |
| Compression ratio | ||
| N2 | >108 | |
| H2 | 105 | |
| Ult. pressure w/ bake out heating | 10-7 Pa | 10-9 Torr |
| Max. continuous outlet pressure | 13 Pa | 0.1 Torr |
| Max. nitrogen throughput | 2500 sccm | |
| Rated speed | 35,000 rpm | |
| Starting time | 6 min | |
| Max inlet flange temperature | 120 C | |
| Input voltage | 100 to 120 | |
| Power consumption | 0.8 kVA | |
| Weight | 31 kg |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Edwards STP1003 / C Turbomolecular Vacuum Pump - NEW STP1003C ISO200F Inlet Part no. YT39B0130, YT39-B0-130 STP1003 ISO200F Inlet Part no. YT390Z001, YT39-0Z-001 STP1003C DN200CF Inlet Part no. PT39AZ003, PT39-AZ-003 STP1003 DN200CF Inlet Part no. YT39B0010, YT39-B0-010
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