Edwards STP1003 / C Turbo Vacuum Pump - NEW
Click Image to Enlarge
Edwards STP1003 / C Turbomolecular Vacuum Pump - NEW
Edwards corrosion resistant STP1003C is a new turbomolecular pump for use in the most advanced of semiconductor applications. Edwards’s rotor technology gives class-leading performance for maximum process flexibility. This pump has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Technology
- Maximized process flexibility
- Oil free
- Low vibration
- High reliability
- Maintenance free
- Harsh process compatible (C version)
- Increased life
Advanced Controller Design
- Auto tuning
- Self diagnostic functions
- DC motor drive
- Battery-free operation
Compact Design
- Small footprint
- Half rack controller
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Inlet flange | ISO-200F |
| Outlet port | KF-40 |
| Purge port | KF-10 |
| Water cooling fitting | PT1/4 |
| Pumping speed | |
| N2 | 1,000 l/s-1 |
| H2 | 800 l/s-1 |
| Compression ratio | |
| N2 | > 108 |
| H2 | 105 |
| Ultimate pressure w/ bake out heating | 10-7 Pa (10-9 Torr) |
| Max. continuous outlet pressure | 13 Pa (0.1 Torr) |
| Max. nitrogen throughput | 2,500 sccm |
| Rated speed | 35,000 rpm |
| Starting time | 6 min |
| Max inlet flange temperature | 120°C |
| Input voltage | 100 to 120 |
| Power consumption | 0.8 kVA |
| Weight | 31 kg |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Edwards STP1003 / C Turbomolecular Vacuum Pump - NEW YT390Z001 / YT39-0Z-001 STP1003 ISO-200F YT39B0010 / YT39-B0-010 STP1003 DN 200 CF YT39B0130 / YT39-B0-130 STP1003C ISO-200F PT39AZ003 / PT39-AZ-003 STP1003C DN 200 CF
Related Products
