Edwards STP603 / C Turbo Vacuum Pump - NEW
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Edwards STP603 / C Turbomolecular Vacuum Pump - NEW
Edwards STP603 is a new turbomolecular pump for use in the most advanced semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility. This pump has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Technology
- Maximized process flexibility
- Oil free
- Low vibration
- High reliability
- Maintenance free
Advanced Controller Design
- Auto tuning
- Self diagnostic functions
- DC motor drive
- Battery-free operation
Compact Design
- Small footprint
- Half rack controller
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Inlet flange | ISO-160F |
| Pumping speed | |
| N2 | 650 l/s-1 |
| H2 | 550 l/s-1 |
| Compression ratio | |
| N2 | > 108 |
| H2 | > 105 |
| Ultimate pressure w/ bake out heating | 10-7 Pa (10-9 Torr) |
| Max. continuous outlet pressure | 13 Pa (10-10 Torr) |
| Max. continuous outlet pressure | 13 Pa (0.1 Torr) |
| Rated speed | 35,000 rpm |
| Starting time | 6 min |
| Max inlet flange temperature | 120°C |
| Input voltage | 100 to 120 |
| Power consumption | 0.8 kVA |
| Weight | 31 kg |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Edwards STP603 / C Turbomolecular Vacuum Pump - NEW YT39B0030 / YT39-B0-030 STP603 ISO-160F YT390Z005 / YT39-0Z-005 STP603 DN 160 CF YT39AZ002 / YT39-AZ-002 STP603C DN 160 CF YT39AZ000 / YT39-AZ-000 STP603C VG-150
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