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Edwards STP603 / C - NEW

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Edwards STP603 / C - NEW
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Edwards STP603 / C - NEW

Edwards STP603 / C Turbomolecular Vacuum Pump - NEW

Edwards STP603 is a new turbomolecular pump for use in the most advanced semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility. This pump has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Advanced Rotor Technology

  • Maximized process flexibility
  • Oil free
  • Low vibration
  • High reliability
  • Maintenance free

Advanced Controller Design

  • Auto tuning
  • Self diagnostic functions
  • DC motor drive
  • Battery-free operation

Compact Design

  • Small footprint
  • Half rack controller

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inlet flange ISO-160F
Pumping speed
    N2 650 l/s-1
    H2 550 l/s-1
Compression ratio
    N2 > 108
    H2 > 105
Ultimate pressure w/ bake out heating     10-7 Pa (10-9 Torr)
Max. continuous outlet pressure 13 Pa (10-10 Torr)
Max. continuous outlet pressure 13 Pa (0.1 Torr)
Rated speed 35,000 rpm
Starting time 6 min
Max inlet flange temperature 120°C
Input voltage 100 to 120
Power consumption 0.8 kVA
Weight 31 kg

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Edwards STP603 / C Turbomolecular Vacuum Pump - NEW

P/N YT39-B0-030 / YT39B0030  STP603  ISO-160F
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P/N YT39-AZ-002 / YT39AZ002  STP603C  DN 160 CF
    YT39-AZ-000 / YT39AZ000  STP603C  VG-150