Edwards STPA1303C Turbo Vacuum Pump - NEW
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Edwards STPA1303C Turbomolecular Vacuum Pump - NEW
Edwards STPA1303C is a turbomolecular pump designed for use in semiconductor applications. Edwards advanced rotor technology gives class-leading performance for maximum process flexibility. The STPA1303C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Technology
- Higher gas throughput
- Maximized process flexibility
- Oil free
- Low vibration
- High reliability
- Maintenance free
- Harsh process compatible
- Increased life
Advanced Controller Design
- Auto tuning
- Self diagnostic functions
- d.c. motor drive
- Battery-free operation
- Small footprint
- Half rack controller
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
|Water cooling fitting||PT1/4|
|Ult. pressure w/ bake out heating||10-7 Pa||10-9 Torr|
|Max. continuous outlet pressure||270 Pa||2 Torr|
|Max. nitrogen throughput||1,500 sccm|
|Rated speed||35,500 rpm|
|Starting time||7 min|
|Max inlet flange temperature||120°C|
|Input voltage||200 to 240|
|Power consumption||0.85 kVA|
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Edwards STPA1303C Turbomolecular Vacuum Pump - NEW STPA1303C ISO200F Inlet Part no. B71802020, B718-02-020 STPA1303C DN200CF Inlet Part no. YT36B0030, YT36-B0-030 STPA1303C TMS ISO200F Inlet Part no. YT3626005, YT36-26-005 STPA1303C TMS DN200CF Inlet Part no. YT3626004, YT36-26-004
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