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Edwards STPA1303C Turbo Vacuum Pump - NEW

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Manufacturer Part Number: B71802020
Edwards STPA1303C Turbo Vacuum Pump - NEW
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Edwards STPA1303C Turbomolecular Vacuum Pump - NEW

Edwards STPA1303C is a turbomolecular pump designed for use in semiconductor applications. Edwards advanced rotor technology gives class-leading performance for maximum process flexibility. The STPA1303C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Advanced Rotor Technology

  • Higher gas throughput
  • Maximized process flexibility
  • Oil free
  • Low vibration
  • High reliability
  • Maintenance free
  • Harsh process compatible
  • Increased life

Advanced Controller Design

  • Auto tuning
  • Self diagnostic functions
  • DC motor drive
  • Battery-free operation

Compact Design

  • Small footprint
  • Half rack controller

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inlet flange ISO-200F
Outlet port KF-40
Purge port KF-10
Water cooling fitting PT1/4
Pumping speed
    N2 1,300 l/s-1
    H2 800 l/s-1
Compression ratio
    N2 > 108
    H2 103
Ultimate pressure w/ bake out heating     10-7 Pa (10-9 Torr)
Max. continuous outlet pressure 270 Pa (2 Torr)
Max. nitrogen throughput 1,500 sccm
Rated speed 35,500 rpm
Starting time 7 min
Max inlet flange temperature 120°C
Input voltage 200 to 240
Power consumption 0.85 kVA
Weight 39 kg

Part # B71802020 - ISO-200F

Part # YT36B0030 - DN 200 CF

Part # YT3626005 - ISO-200F TMS

Part # YT3626004 - DN 200 CF TMS

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Edwards STPA1303C Turbomolecular Vacuum Pump - NEW

B71802020 B718-02-020  STPA1303C  ISO-200F
YT36B0030 YT36-B0-030  STPA1303C  DN 200 CF
YT3626005 YT36-26-005  STPA1303C  ISO-200F TMS
YT3626004 YT36-26-004  STPA1303C  DN 200 CF TMS

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