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Edwards STPA1303C Turbo Vacuum Pump - NEW

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Manufacturer Part Number: B71802020
Edwards STPA1303C Turbo Vacuum Pump - NEW
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Edwards STPA1303C Turbomolecular Vacuum Pump - NEW

Edwards STPA1303C is a turbomolecular pump designed for use in semiconductor applications. Edwards advanced rotor technology gives class-leading performance for maximum process flexibility. The STPA1303C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Advanced Rotor Technology

  • Higher gas throughput
  • Maximized process flexibility
  • Oil free
  • Low vibration
  • High reliability
  • Maintenance free
  • Harsh process compatible
  • Increased life

Advanced Controller Design

  • Auto tuning
  • Self diagnostic functions
  • d.c. motor drive
  • Battery-free operation

Compact Design

  • Small footprint
  • Half rack controller

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inlet flange ISO200F
Outlet port KF40
Purge port KF10
Water cooling fitting PT1/4
Pumping speed
    N2 1,300 l/s-1
    H2 800 l/s-1
Compression ratio
    N2 > 108
    H2 103
Ult. pressure w/ bake out heating     10-7 Pa 10-9 Torr
Max. continuous outlet pressure 270 Pa 2 Torr
Max. nitrogen throughput 1,500 sccm
Rated speed 35,500 rpm
Starting time 7 min
Max inlet flange temperature 120°C
Input voltage 200 to 240
Power consumption 0.85 kVA
Weight 39 kg

Part no. B71802020 - ISO200F Inlet

Part no. YT36B0030 - DN200CF Inlet

Part no. YT3626005 - ISO200F Inlet

Part no. YT3626004 - DN200CF Inlet

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Edwards STPA1303C Turbomolecular Vacuum Pump - NEW

STPA1303C ISO200F Inlet
Part no. B71802020, B718-02-020

STPA1303C DN200CF Inlet
Part no. YT36B0030, YT36-B0-030

STPA1303C TMS ISO200F Inlet
Part no. YT3626005, YT36-26-005

STPA1303C TMS DN200CF Inlet
Part no. YT3626004, YT36-26-004

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