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Edwards STPA1603C Turbo Vacuum Pump - NEW

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Manufacturer Part Number: B75100010
Edwards STPA1603C Turbo Vacuum Pump - NEW
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Edwards STPA1603C Turbomolecular Vacuum Pump - NEW

The small and powerful Edwards STPA1603C turbo-molecular pump has been designed using Edwards advanced rotor technology. This provides high throughput, maximum reliability and class leading performance which is demanded by the latest generation of semiconductor processes. Its half rack controller and compact design provide considerable space saving, whilst its advanced deposition reduction system gives improved reliability and performance. The STPA1603C has been qualified on the latest 200 mm etch tools as well as on new generation 300 mm oxide etch processes.

Advanced Rotor Design

  • Increased performance
  • Higher gas throughput
  • High reliability
  • Maintenance free
  • Harsh process compatible

5 Axis Magnetic Suspension System

  • Zero contamination
  • Low vibration

Corrosion Resistant

  • Harsh process compatible
  • Increased life

Compact Design

  • Small footprint
  • Half rack controller

Advanced Controller Design

  • Auto tuning
  • Self diagnostic functions
  • DC motor drive
  • Battery-free operation

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inlet flange ISO-200F
Outlet port KF-40
Purge port KF-10
Water cooling fitting PT1/4
Pumping speed
    N2 1,600 l/s-1
    H2 1,200 l/s-1
Compression ratio
    N2 > 108
    H2 > 7 x 103
Ultimate pressure w/ bake out heating     10-7 Pa (10-9 Torr)
Max. allowable backing pressure 266 Pa (2 Torr)
Max. nitrogen throughput 2,500 sccm
Rated speed
Starting time 7 min
Mounting position Any
Water cooling flow 2 l/min-1
Temperature 5 - 25°C
Pressure 0.3 MPa
Recommended purge gas flow 20 - 50 sccm
Input voltage 200 to 240 VAC
Power consumption 0.85 kVA
Weight 35 kg

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Edwards STPA1603C Turbomolecular Vacuum Pump - NEW

B75100010 B751-00-010  STPA1603C  ISO-200F
B75100100 B751-00-100  STPA1603C  DN 200 CF
YT4616004 YT46-16-004  STPA1603CV  ISO-200F TMS
YT4616005 YT46-16-005  STPA1603CV  DN 200 CF TMS

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