Edwards STPA2203C Turbo Vacuum Pump - NEW
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Edwards STPA2203C Turbomolecular Vacuum Pump - NEW
Edwards STPA2203C is a new turbomolecular pump designed for use in semiconductor applications. It has advanced rotor technology that gives class-leading performance for maximum process flexibility. A new half rack controller gives additional space savings and incorporates d.c. drive technology for battery-free operation. The STPA2203C has been approved for use by major etch, ion implant and deposition equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Design
- Higher gas throughput
- Maximized process flexibility
5 Axis Magnetic Suspension System
- Zero contamination
- Low maintenance
- Harsh process compatible
- Increased life
- Small footprint
- Half rack controller
Advanced Controller Design
- Auto tuning
- Self diagnostic functions
- DC motor drive
- Battery-free operation
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
|Water cooling fitting||PT1/4|
|H2||> 2.5 x 104|
|Ultimate pressure||10-6 Pa (10-8 Torr)|
|Max. allowable backing pressure||400 Pa (3 Torr)|
|Max. nitrogen throughput||1,500 sccm|
|Starting time||7 min|
|Water cooling flow||2 l/min-1|
|Water cooling temperature||5 - 25°C|
|Recommended purge gas flow||20 sccm|
|Input voltage||200 to 240 VAC|
|Power consumption||1.5 kVA|
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Edwards STPA2203C Turbomolecular Vacuum Pump - NEW YT4V0Z002 YT4V-0Z-002 STPA2203C ISO-250F YT4V0Z003 YT4V-0Z-003 STPA2203C DN 250 CF YT4V66001 YT4V-66-001 STPA2203CV ISO-250F TMS YT4V66002 YT4V-66-002 STPA2203CV DN 250 CF TMS
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