Edwards STPA2203C Turbo Vacuum Pump - NEW
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Edwards STPA2203C Turbomolecular Vacuum Pump - NEW
Edwards STPA2203C is a new turbomolecular pump designed for use in semiconductor applications. It has advanced rotor technology that gives class-leading performance for maximum process flexibility. A new half rack controller gives additional space savings and incorporates d.c. drive technology for battery-free operation. The STPA2203C has been approved for use by major etch, ion implant and deposition equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Design
- Higher gas throughput
- Maximized process flexibility
5 Axis Magnetic Suspension System
- Zero contamination
- Low maintenance
- Harsh process compatible
- Increased life
- Small footprint
- Half rack controller
Advanced Controller Design
- Auto tuning
- Self diagnostic functions
- d.c. motor drive
- Battery-free operation
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
|Water cooling fitting||PT1/4|
|H2||> 2.5 x 104|
|Ult. pressure||10-6 Pa||10-8 Torr|
|Max. allowable backing pressure||400 Pa||3 Torr|
|Max. nitrogen throughput||1,500 sccm|
|Starting time||7 min|
|Water cooling flow||2 l/min-1|
|Water cooling temperature||5 - 25°C|
|Recommended purge gas flow||20 sccm|
|Input voltage||200 to 240 VAC|
|Power consumption||1.5 kVA|
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Edwards STPA2203C Turbomolecular Vacuum Pump - NEW STPA2203C ISO250F Inlet Part no. YT4V0Z002, YT4V-0Z-002 STPA2203C DN250CF Inlet Part no. YT4V0Z003, YT4V-0Z-003 STPA2203CV TMS ISO250F Inlet Part no. YT4V66001, YT4V-66-001 STPA2203CV TMS DN250CF Inlet Part no. YT4V66002, YT4V-66-002
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