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Edwards STPA2203C Turbo Vacuum Pump - NEW

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Edwards STPA2203C Turbo Vacuum Pump - NEW
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Edwards STPA2203C Turbomolecular Vacuum Pump - NEW

Edwards STPA2203C is a new turbomolecular pump designed for use in semiconductor applications. It has advanced rotor technology that gives class-leading performance for maximum process flexibility. A new half rack controller gives additional space savings and incorporates d.c. drive technology for battery-free operation. The STPA2203C has been approved for use by major etch, ion implant and deposition equipment manufacturers in the semiconductor and magnetic media industries.

Advanced Rotor Design

  • Higher gas throughput
  • Maximized process flexibility

5 Axis Magnetic Suspension System

  • Zero contamination
  • Low maintenance

Corrosion Resistant

  • Harsh process compatible
  • Increased life

Compact Design

  • Small footprint
  • Half rack controller

Advanced Controller Design

  • Auto tuning
  • Self diagnostic functions
  • DC motor drive
  • Battery-free operation

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inlet flange ISO-250F
Outlet port KF-40
Purge port KF-10
Water cooling fitting PT1/4
Pumping speed
    N2 2,200 l/s-1
    H2 1,700 l/s-1
Compression ratio
    N2 > 108
    H2 > 2.5 x 104
Ultimate pressure  10-6 Pa (10-8 Torr)
Max. allowable backing pressure     400 Pa (3 Torr)
Max. nitrogen throughput 1,500 sccm
Rated speed 27,000
Starting time 7 min
Mounting position Any
Water cooling flow 2 l/min-1
Water cooling temperature 5 - 25°C
Pressure 0.3 MPa
Recommended purge gas flow 20 sccm
Input voltage 200 to 240 VAC
Power consumption 1.5 kVA
Weight 61 kg

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Edwards STPA2203C Turbomolecular Vacuum Pump - NEW

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