Edwards STPA803C Turbo Vacuum Pump - NEW
Edwards STPA803C Turbomolecular Vacuum Pump - NEW
Edwards STPA803C turbomolecular pump is designed for use in semiconductor applications. Edwards advanced rotor technology gives class-leading performance for maximum process flexibility. The STPA803C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Technology
- Maximized process flexibility
- Oil free
- Low vibration
- High reliability
- Maintenance free
- Harsh process compatible
- Increased life
Advanced Controller Design
- Auto tuning
- Self diagnostic functions
- d.c. motor drive
- Battery-free operation
Compact Design
- Small footprint
- Half rack controller
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
Edwards STPA803C Turbomolecular Vacuum Pump - NEW
Part no. YT36B0040 - ISO160F Inlet
Part no. YT36B0010 - DN160CF Inlet
Part no. YT3626000 - ISO160F Inlet
| Inlet flange | ISO160F | |
| Outlet port | KF40 | |
| Purge port | KF10 | |
| Water cooling fitting | PT1/4 | |
| Pumping speed | ||
| N2 | 800 l/s-1 | |
| H2 | 520 l/s-1 | |
| Compression ratio | ||
| N2 | >108 | |
| H2 | 103 | |
| Ult. pressure w/ bake out heating | 10-7 Pa | 10-9 Torr |
| Max. continuous outlet pressure | 270 Pa | 2 Torr |
| Max. nitrogen throughput | 1500 sccm | |
| Rated speed | 32,500 rpm | |
| Starting time | 7 min | |
| Max inlet flange temperature | 120 C | |
| Input voltage | 200 to 240 | |
| Power consumption | 0.85 kVA | |
| Weight | 9 kg |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Edwards STPA803C Turbomolecular Vacuum Pump - NEW STPA803C ISO160F Inlet Part no. YT36B0040, YT36-B0-040 STPA803C DN160CF Inlet Part no. YT36B0010, YT36-B0-010 STPA803CV (TMS) ISO160F Inlet Part no. YT3626000, YT36-26-000 STPA803CV (TMS) DN160CF Inlet Part no. YT3626003, YT36-26-003
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