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Edwards STPA803C Turbo Vacuum Pump - NEW

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Edwards STPA803C Turbo Vacuum Pump - NEW
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Edwards STPA803C Turbomolecular Vacuum Pump - NEW

Edwards STPA803C turbomolecular pump is designed for use in semiconductor applications. Edwards advanced rotor technology gives class-leading performance for maximum process flexibility. The STPA803C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Advanced Rotor Technology

  • Maximized process flexibility
  • Oil free
  • Low vibration
  • High reliability
  • Maintenance free
  • Harsh process compatible
  • Increased life

Advanced Controller Design

  • Auto tuning
  • Self diagnostic functions
  • DC motor drive
  • Battery-free operation

Compact Design

  • Small footprint
  • Half rack controller

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inlet flange ISO-160F
Outlet port KF-40
Purge port KF-10
Water cooling fitting PT1/4
Pumping speed
    N2 800 l/s-1
    H2 520 l/s-1
Compression ratio
    N2 > 108
    H2 103
Ultimate pressure w/ bake out heating     10-7 Pa (10-9 Torr)
Max. continuous outlet pressure 270 Pa (2 Torr)
Max. nitrogen throughput 1,500 sccm
Rated speed 32,500 rpm
Starting time 7 min
Max inlet flange temperature 120°C
Input voltage 200 to 240
Power consumption 0.85 kVA
Weight 9 kg

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Edwards STPA803C Turbomolecular Vacuum Pump - NEW

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