Edwards STPH301C Turbo Vacuum Pump - NEW
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Edwards STPH301C Turbomolecular Vacuum Pump - NEW
Edwards high performance STPH301C turbomolecular pump has been designed for use in the harshest of semiconductor applications. The pumps field proven reliability and class-leading performance give maximum process flexibility. The STPH301C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Technology
- Higher gas throughput
- Maximized process flexibility
- Oil free
- Low vibration
- High reliability
- Maintenance free
- Harsh process compatible
- Increased life
Advanced Controller Design
- Auto tuning
- Self diagnostic functions
- DC motor drive
- Battery-free operation
- Small footprint
- Half rack controller
5 Axis Magnetic Suspension System
- Zero contamination
- Low maintenance
- Any orientation operation
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
|Water cooling fitting||PT1/4|
|Ultimate pressure w/ bake out heating||10-7 Pa (10-9 Torr)|
|Max. continuous outlet pressure||665 Pa (5 Torr)|
|Max. nitrogen throughput||2,500 sccm|
|Rated speed||48,000 rpm|
|Starting time||4 min|
|Max inlet flange temperature||120°C|
|Input voltage||100 to 120|
|Power consumption||0.6 kVA|
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Edwards STPH301C Turbomolecular Vacuum Pump - NEW B71901010 B719-01-010 STPH301C ISO-100K YT340Z004 YT34-0Z-004 STPH301C DN 100 CF YT3416001 YT34-16-001 STPH301CV ISO-100F TMS
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