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Edwards STPH301C Turbo Vacuum Pump - NEW

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Manufacturer Part Number: B71901010
Edwards STPH301C Turbo Vacuum Pump - NEW
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Edwards STPH301C Turbomolecular Vacuum Pump - NEW

Edwards high performance STPH301C turbomolecular pump has been designed for use in the harshest of semiconductor applications. The pumps field proven reliability and class-leading performance give maximum process flexibility. The STPH301C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Advanced Rotor Technology

  • Higher gas throughput
  • Maximized process flexibility
  • Oil free
  • Low vibration
  • High reliability
  • Maintenance free
  • Harsh process compatible
  • Increased life

Advanced Controller Design

  • Auto tuning
  • Self diagnostic functions
  • d.c. motor drive
  • Battery-free operation

Compact Design

  • Small footprint
  • Half rack controller

5 Axis Magnetic Suspension System

  • Zero contamination
  • Low maintenance
  • Any orientation operation

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inlet flange ISO100K
Outlet port KF40
Purge port KF10
Water cooling fitting PT1/4
Pumping speed
N2 300 l/s-1
H2 200 l/s-1
Compression ratio
N2 >108
H2 103
Ult. pressure w/ bake out heating 10-7 Pa 10-9 Torr
Max. continuous outlet pressure 665 Pa 5 Torr
Max. nitrogen throughput 2500 sccm
Rated speed 48,000 rpm
Starting time 4 min
Max inlet flange temperature 120 C
Input voltage 100 to 120
Power consumption 0.6 kVA
Weight 15 kg

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Edwards STPH301C Turbomolecular Vacuum Pump - NEW

STPH301C ISO100K Inlet
Part no. B71901010, B719-01-010

STPH301C DN100CF Inlet
Part no. YT340Z004, YT34-0Z-004

STPH301CV TMS ISO100F Inlet
Part no. YT3416001, YT34-16-001

STPH451CV TMS DN160CF Inlet
Part no. YT3416005, YT34-16-005

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