Edwards STPH451C Turbo Vacuum Pump - NEW
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Edwards STPH451C Turbomolecular Vacuum Pump - NEW
Edwards high performance STPH451C turbomolecular pump has been designed for use in the harshest of semiconductor applications. The pumps field proven reliability and class-leading performance give maximum process flexibility. The STPH451C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Technology
- Higher gas throughput
- Maximized process flexibility
- Oil free
- Low vibration
- High reliability
- Maintenance free
- Harsh process compatible
- Increased life
Advanced Controller Design
- Auto tuning
- Self diagnostic functions
- d.c. motor drive
- Battery-free operation
- Small footprint
- Half rack controller
5 Axis Magnetic Suspension System
- Zero contamination
- Low maintenance
- Any orientation operation
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
|Water cooling fitting||PT1/4|
|Ult. pressure w/ bake out heating||10-7 Pa||10-9 Torr|
|Max. continuous outlet pressure||665 Pa||5 Torr|
|Max. nitrogen throughput||2,500 sccm|
|Rated speed||48,000 rpm|
|Starting time||4 min|
|Max inlet flange temperature||120°C|
|Input voltage||100 to 120|
|Power consumption||0.6 kVA|
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Edwards STPH451C Turbomolecular Vacuum Pump - NEW STPH451C ISO160K Inlet Part no. B71901001, B719-01-001 STPH451C DN160CF Inlet Part no. PT340Z005, PT34-0Z-005 STPH451CV TMS ISO160F Inlet Part no. YT3416007, YT34-16-007 STPH451CV TMS DN160CF Inlet Part no. YT3416006, YT34-16-006
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