Edwards

The Edwards Seiko Seiki turbo pumps use magnetically levitated bearings, which have several benefits. There is no risk of vacuum contamination, a vital feature in semiconductor and scientific applications where even the minutest impurity will affect results. Noise levels are low and vibration is almost imperceptible - the peak-to-peak level is less than 0.02 mµ, an amplitude which remains constant throughout the life of the pump and is free from troublesome sub-harmonics. Magnetic bearings do not need maintenance, an important factor in processes producing chemical or radioactive contamination.

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An STP pump can be installed in any orientation and operate by remote control. If any rotor imbalance occurs (by deposition of process by-products, for example) sensors detect changes in its motion and compensate the magnetic fields accordingly. There are backup precision mechanical bearings to protect the pump in the event of a total disruption of magnetic suspension or a sudden massive air inrush that overcomes the magnetic bearing stiffness.

Model names ending in a C are corrosion-resistant, with nickel-coated rotors and stators and a nitrogen purge port. Ones with a prefix of H or A are high throughput pumps incorporating a hybrid pumping mechanism for higher gas flow. These are optimized for processes such as plasma etch. We also offer repair service.

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