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Full Regeneration

Initiate On-Board® IS Group Full Regeneration

Executive Summary

With the introduction of the On-Board® IS Cryopumping System the ability to perform a grouped regeneration from the IS Remote, aka "Gameboy" has been significantly enhanced with its graphical user like Interface. This white paper will explain how to setup and execute a group regeneration from the IS Controller via the Gameboy.

Background

Customers on occasion would like the flexibility to independently perform a regeneration on multiple cryopumps. Currently, this is accomplished by performing the regenerations in a serial fashion, which is very time consuming.

Resolution

Cryopumps can be "grouped" together to perform a regeneration. The group regeneration logic resides in the IS Controller and is accessed via the Gameboy. The technician has the ability to choose which cryopumps they would like to regenerate at the same time.

Equipment Required

1 - On-Board IS Remote (Gameboy)
1 - USB Type A Male / Type B Male Cable ~ 6' long
Access to one of the RS-232 commination connectors on the IS Controller

Procedure

In order to perform a group regeneration you need to create a Rough Map which identifies which cryopumps will be regenerated together. In addition, a Helium Map is required that links the cryopumps to be regenerated to the compressor(s).

*Note: Cryopump and compressor addresses will vary based on how they were integrated in the semiconductor equipment.

1. Connect the Gameboy to one of the RS-232 connectors on the IS Controller
2. From the Gameboy's home screen using the Arrow and Enter keys to configure the Rough Map as follows:

1. From the Gameboy's home screen using the Arrow and Enter keys to configure the Helium Map as follows:

2. From the Gameboy's home screen using the Arrow and Enter keys to initiate a Grouped Full Regeneration:

3. The Gameboy will provide status throughout the regeneration cycle.

If technical assistance is required, please contact our Customer Service Representative.

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  • 1-626-385-3585 Outside the United States of America

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