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Genmark Automation Remote Pre-Aligner (RPA)

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Manufacturer Part Number: RP060510
Genmark Automation Remote Pre-Aligner (RPA)
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Specifications RPA
Vertical travel 0, 8.5", 13.5", 16.5"
Alignment time 5 seconds
Alignment accuracy Center offset - 0.002"
Angular offset - 0.1°
Maximum velocity of the vertical motion 20"/s
Maximum acceleration of the vertical motion 40"/s2
Initial offset allowance 0.5"
Wafer Sizes 100mm, 125mm, 150mm, 200mm, 300mm
Weight 10 lbs.

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Genmark Automation Remote Pre-Aligner (RPA)


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