Genmark Automation Remote Pre-Aligner (RPA)
|Vertical travel||0, 8.5", 13.5", 16.5"|
|Alignment time||5 seconds|
|Alignment accuracy||Center offset - 0.002"
Angular offset - 0.1°
|Maximum velocity of the vertical motion||20"/s|
|Maximum acceleration of the vertical motion||40"/s2|
|Initial offset allowance||0.5"|
|Wafer Sizes||100mm, 125mm, 150mm, 200mm, 300mm|
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Genmark Automation Remote Pre-Aligner (RPA) RP060510 RP060523
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