EBARA EV-A Series

Date: May 4, 2015

The EV-A Series is a family of air-cooled, dry pumps that have industry-leading specifications. The family consists of the EV-A3 (9 cfm), the EV-A6 (21.6 cfm), and the EV-A10 (36 cfm) pumps. Typical applications include Load Locks, PVD Systems, Analytical Instruments and Electron Microscopes. These pumps are ideal for replacing wet pumps as well as Scroll type dry vacuum pumps.