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INFICON Transpector CPM 2.5 Compact Process Monitor

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INFICON Transpector CPM 2.5 Compact Process Monitor
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INFICON Transpector CPM 2.5 Compact Process Monitor

FEATURES

  • Quadrupole-based gas analysis system for monitoring complex processes.
  • Allows 24/7 monitoring to maximize yield and throughput, thereby minimizing costs.
  • Compact and affordable enough to be installed on every high-pressure vacuum chamber.
  • HexBlock™ sampling system maximizes performance.
  • Built-in CDG for process pressure monitoring and vacuum interlock.
  • Optional calibration reference available for tuning and gas reference.
  • Long-life closed ion source permits contaminant detection at sub-ppm levels while resisting most corrosive and reactive gases.
  • Lightweight and easily transportable.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

  100 AMU CPM 200 AMU CPM 300 AMU CPM
Mass range 1 to 100 amu 1 to 200 amu 1 to 300 amu
Peak width @ 10% peak minimum < 1 amu
Ion source type Closed
Total pressure range 5E-7 to 1E-3 Torr
Total pressure accuracy ± 25% 1E-6 to 1E-3 Torr
Max ion source operating pressure 1E-3 Torr
Nominal ion source operating pressure 2E-4 Torr

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

INFICON Transpector CPM 2.5 Compact Process Monitor

ACCESSORIES

CPM Compact Process Monitor

911-451-P1  USB to RS-232 converter
923-720-G1  1,000 Torr CPM CDG including cable
923-720-G2  100 Torr CPM CDG including cable
923-720-G3  10 Torr CPM CDG including cable
923-720-G4  1 Torr CPM CDG including cable

SPARE PARTS

915-700-G2  Closed Ion Source kit (Tungsten - Standard CVD / Etch)
915-701-G2  Sensor filament kit (for standard and sleeved ion source)
915-723-G1  Closed Ion Source kit (Lined anode)(one liner installed and two spares)
915-724-G1  Package of three spare liners (used only with liner configured ion source)
923-208-G11  1 Torr CPM CDG
923-208-G12  10 Torr CPM CDG
923-208-G13	 1,000 Torr CPM CDG
923-401-P1  Manifold Heater
923-403-P2  CPM Valve Controller Manifold Assembly
923-404-P1  HexBlock Insulator
923-603-G2  CPM Controller (used with Pfeiffer Vacuum pump)
059-040  Replacement c-ring
922-204-G1  Capillary assembly - 1.5 m
922-204-G3  Capillary assembly - 3 m
923-706-G10  30 Torr HexBlock orifice (10.5 micron)
923-706-G3  10 Torr HexBlock orifice (20 micron)
923-706-G4  1 Torr HexBlock orifice (62 micron)
923-706-G5  100 mtorr HexBlock orifice (200 micron)
923-706-G6  10 mtorr HexBlock orifice (750 micron)
923-706-G7  360 mtorr HexBlock orifice (120 micron)
923-706-G8  15 mtorr HexBlock orifice (350 micron)
923-706-G9  3 Torr HexBlock orifice (35 micron)
923-707-G1  10 Torr HexBlock sniffer (5 cm length)
923-707-G2  100 Torr HexBlock sniffer (5 cm length)
923-707-G3  7 Torr HexBlock sniffer
923-707-G4  30 Torr HexBlock sniffer (10 cm length)
923-707-G5  300 Torr HexBlock sniffer (5 cm length)
923-707-G6  30 Torr HexBlock sniffer (30.5 cm length)
923-707-G7  10 Torr HexBlock sniffer (30.5 cm length)
923-723-G1  Diaphragm pump 4 stage - 24 V(dc)
923-724-G1  Pfeiffer Vacuum compound pump kit, non corrosive system
923-724-G2  Pfeiffer Vacuum compound pump kit, corrosive system
923-710-G1  HexBlock orifice replacement tools
923-711-G1  HexBlock valve replacement kit
923-712-G1  Spare HexBlock orifice gasket (pack of five)
923-722-G1  Replacement diaphragm kit for 2-stage pump
930-4241-P1  Replacement diaphragm kit for 4-stage pump