INTEVAC RF RMR 84mm Hard Disk Drive Source
INTEVAC RF RMR 84mm Hard Disk Drive Multi Layer Source
Similar to the Triatron source, the MLS is capable of deposition of up to three different materials but operates in a pass by mode, and is more suited to actual manufacturing of multi-layer magnetic stack media with high throughput, excellent uniformity and low material usage. Materials are deposited from target material that are adjacent to each other as opposed to concentric target rings.
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INTEVAC RF RMR 84mm Hard Disk Drive Multi Layer Source