INTEVAC Triatron Hard Disk Dirve Process Source
INTEVAC Triatron Hard Disk Drive Process Source
Deposition source capable of independently depositing up to three different materials in the same process chamber simultaneously or sequentially, and can sputter from one or more of its three concentric rings targets. Most applicable for R&D activities where the study of various material composition ratios is required to select optimum performing magnetic thin film materials.
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INTEVAC Triatron Hard Disk Drive Process Source