Used Micromanipulator 6100 Prober
Ask for current price. The 6100 Model is an economical analytical probe station for wafers or packaged devices. Fast X-Y stage movement controls allows 5" wafers (6" optional) to be scanned. Conversation from a wafer prober to a packaged device prober or hot/cold stage (and back again) can be accomplished using the optional socket stage adapter. The vacuum stage is permanently planarized at the factory, so no adjustments are needed when it is replaced.
Model 450 and 550 manipulators with vacuum bases can be mounted on the large platen. The platen moves vertically with submicron precision in a true plane. Both probe card and individual analytical probes can be raised or lowered in increments of a micron or less, with excellent repeatability. This capability greatly facilitates changes in probes, devices, or test fixturing.
Submicron resolution is attained with the MicroZoom microscope. The 6100's microscope post has an X-Y movement of 1" x 1" to allow large devices to be completely scanned, even if the operator neglects to center the device. The 1" vertical movement allows probes and optics to be raised for sample changes or fixturing adjustments.
The 6100 is a foundation on which to build a complete probing system tailored to your needs by adding some of the many accessories available. Micromanipulator options include a hot/cold stage, active low capacitance FET probe, shielded probes for high frequency or low signal levels, ultrasonic cutter for quickly cutting hard materials, probe card holders, packaged device socket cards, and more.
Microscope and objectives furnished to your requirement.
