Used Veeco/Miller FPP-5000
Call for pricing and availability.
Four Point Probe Automatic Resistivity Meter
- Easy to operate: simply load the wafer and close the lid.
- Automatic calculation and display of sheet or slice resistivity, V/I, metallization thickness, and P-N type.
- Ideal for epitaxial, diffused, ion implanted, and metallized layers.
- Internal self-calibration at each measurement ensures instrument accuracy of 0.5%.
- Automatic geometric correction using two-probe configuration technique minimizes errors due to variation in probe tip spacing.
- Programmable constants allow automatic correction for small sample sizes.
Measurement Functions and Range
Digital computation allows the direct, error tree, display of sheet resistivity in ohm/square from 1.1 Mohm/sq to 450 kohm/sq, slice resistivity in ohm-centimeters from 4.19 x 10-2 Mohm-cm to 17.1 kohm-cm, V/I in ohms from 0.25 Mohm to 99.9 kohm or metallization thickness in kilo angstroms from 20 A to 243 KA. Use of graphs, tables or mechanical calculations and other associated errors are totally eliminated.
Operation
Operator simply places water on molded water carrier, and closes RFI/light shield to initiate test. Unit automatically ranges to correct range and displays correct reading including decimal point and multiplier and water type simultaneously. Reading is held to assist in data logging until next test is initiated.
Probe Head
Convenient plug in probe head adapter assembly permits changing or replacing of worn probe heads in minutes without special tools or alignment fixtures. Alessi probe heads are provided as standard equipment. K&S heads are optional.
Constant Force Mechanism
The FPP-5000 utilizes a probe up configuration. This probe up technique assures repeatable probe pressure at every test independent of operator force and substrate thickness.
Probe Tip and Wafer Protection
The probe tips remain below the stage of the FPP-5000 until the cover is lowered, eliminating damage to the water. Probe tips are not powered until after contact with the wafer to eliminate arcing with consequent probe tip erosion and wafer pitting.
RFI/Light Shield
Cast aluminum RFI/light shield eliminates problems due to radio frequency noise and photoelectric effects when measuring high resistivity layers.
Direct Digital Display
Test results are displayed on a direct five digit LED display.
Penetration Function
Built-in penetration function applies a 170V, 4 msec pulse to probes through a 10 Mohm resistance prior to test for low contact resistance if desired. Penetrate function is front panel selected.
Auto Typing
Automatic type testing (P-N) is determined by a rectification or thermoelectric test. The substrate type will be indicated by illumination of either the P or N indicator. Invalid or questionable tests are indicated by illumination of both indicators.
Forward and Reverse Current Test
Automatic forward and reverse current test for instant verification of proper probe tip contact.
Cycle Time
Total test time less than 2 seconds.
Electronic Accuracy
±0.5% on all but extreme ranges for contact resistances up to 5 kohm. Automatic zero circuit minimizes thermal and source impedance effects and eliminates need to manually readjust instrument zero. The self calibration and zero circuitry assures high accuracy.
Voltage Detector
Input impedance 10 Mohm. Input bias current 5O pA.
Maintenance and Service
The microprocessor based electronics employ state of the art components for trouble free operation and high reliability. All electronic components are mounted on easily replaced printed circuit boards. Operation and maintenance manuals are included.
Operating Temperature Range
15°C to 30°C
Power
115/230 volts, 50/60 Hz. Less than 12 Watts.
Dimensions
15" wide, 16" deep, 5" high (lid closed,) 15" high (lid open.)
Options
Fragment Carrier and One Wafer Carrier
- 50mm
- 75mm
- 100mm
- 125mm
- 150mm
- RS232 Interface: allows printout of all measurement data, operator and wafer identification. Data can also be supplied to a host computer.
- Remote Head: ideal for resistivity and thickness measurements on large metallized surfaces. System includes an external probe head assembly (internal probe is removed) connected to the main unit through an 8ft cable.
| Application for Probe Head Assembly | Pressure gm/pin | Tip Radii mils | Part No. |
|---|---|---|---|
| Standard for Si slices and ingots | 70-180 | 2.0 | 8295-239-01 |
| Epilayers <1µ thick, resistance >1 Mohm | 40-70 | 2.0 | 8295-239-03 |
| Epilayers <1µ thick, resistance <1 Mohm | 40-70 | 5.0 | 8295-239-05 |
| Metallization layers | 40-70 | 10.0 | 8295-239-07 |
Resistivity 4-point Probe Head
Use the above part number or a custom ordering code: SP/RM
Spacing
- 4 = 1.25 mm (0.04 in.)
- 5 = 1 mm (0.05 in.)
- 6 = 1.55 mm (0.0625 in.)
Pressure
- 4 = 40 - 70 gms (1.41 - 2.47 oz)
- 7 = 70 - 180 gms (2.47 - 6.35 oz)
Radii
- 7 = 17.5 µm (0.7 mils)
- 0 = 50 µm (2 mils)
- 5 = 125 µm (5 mils)
- 1 = 250 µm (10 mils)
Material
- 0 = Tungsten carbide
- S = Osmium
Warranty
One year warranty, except probe head, which is a consumable item.
Digital Manuals
- Concise description and functions.