MKS ASTeX ASTRONex FI80131
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USED MKS ASTeX ASTRONex FI80131 Reactive Gas Generator
The MKS ASTeX ASTRONex reactive gas generator is a reactive source for chamber cleaning and other reactive gas applications. The ASTRONex uses low field toroidal plasma to dissociate input gas to produce downstream reactive chemistries. It effectively dissociates alternative gases such as C3F8 and CF4 as an atomic florine generator.
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|Gas Supply||100% Ar for ignition only|
|Operating Pressure||1 to 4 Torr during ignition measured at ASTRON outlet
1 to 10 Torr post ignition measured at ASTRON outlet once flow is stabilized
|Reactant Output||> 94% dissociation up to 2.5 slm, 3 to 10 Torr
> 94% dissociation up to 3.0 slm, 5 to 10 Torr
|> 98% dissociation up to 6 slm NF3|
|Wetted Materials||6061-T6 Aluminum hardcoat anodized, Chemraz, Alumina, Sapphire|
|Control Interface||9 and 25 pin D, opto-isolated I/O|
|Outputs||Ready, AC line, Plasma On|
|Power||180 to 228 VAC, 50/60 Hz, 30A, 3-phase||187 to 228 VAC, 50/60 Hz, 60A, 3-phase|
|Cooling water||1.5 gpm, < 30°C||2.0 gpm, < 30°C|
|Ambient temp.||40°C max|
|Compliance||S2-0200, CE, NRTL, SEMI F47|
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USED MKS ASTeX ASTRONex FI80131 Reactive Gas Generator FI80131 0920-00057 FI80131-C 0920-00057CW