MKS ENI RF 13.56 MHz Power Supplies - REPAIR SERVICE
Call for a quote or fill out the RFQ form: 90 day warranty repair service and testing on most MKS ENI 13.56 MHz RF plasma power supplies.
- ACG-3, ACG-3B, ACG-3XL
- ACG-5, ACG-5J, ACG-5XL
- ACG-6, ACG-6B, ACG-6M5
- ACG-10, ACG-10-01, ACG-10B, ACG-10B-01, ACG-10B-02, ACG-10B-03, ACG-10B-07, ACG-10T, ACG-10XL
- GHW-12A, GHW-12Z
- GHW-25A, GHW-25Z, GHWE-25
- GHW-50A, GHW-50Z-07126
- MW-5, MW-5D, MW-5DM11, MW-5D-01A, MW-5D-01B, MW-5D-01M2, MW-5D-01M5, MW-5-21021
- MW-10, MW-10D, MW-10T, MW-10-21191
- MW-25D, MW-25D-02M1, MW-25D-02M3
- MWD-25LD-02, MWD-25LD-06
- MWH-5-01M1, MWH-5-01M2, MWH-5-01M3
- MWH-100-1, MWH-100-01, MWH-100-01M6
- OEM-6, OEM-6A, OEM-6B, OEM-6M
- OEM-650, OEM-650A, OEM-650A-XL
- OEM-10, OEM-10B
- OEM-12, OEM-12A, OEM-12A-XL
- OEM-12B, OEM-12B-02, OEM-12B-07, OEM-12B3, OEM-12B3-02, OEM-12B3-07, OEM-12B3-08, OEM-12L
- OEM-25, OEM-25A, OEM-25B-01, OEM-25N, OEM-25N-11481, OEM-25N-XL, OEM-25XL
- OEM-28B-02, OEM-28B-03, OEM-28B-04, OEM-28B-07, OEM-28B-08
- OEM-50, OEM-50N-11601, OEM-50N-XL
- PL-2HF, PL-2HF-11451, PL-2HF-11451-54, PL-2HF-11451-55
- PL-2HFN-01, PL-2HFN-1
- RFC-6-01, RFC-6-02
Request an RMA Return Material Authorization
Need an exchange? We recognize that some replacements are more critical than others or that it is not convenient to remove a pump without the replacement immediately at hand. On our form, check the box to request an exchange and we will follow up with current availability.
Procedures for shipping used equipment to PTB Sales:
- Seal openings.
- Attach our pump declaration or valve declaration form to the equipment to declare what contaminates the equipment has been exposed to.
There is a $300 Evaluation Fee. This gets applied to the cost of repair.
Questions? Please call our toll free number at 866-332-0500 or send an e-mail to our sales team!