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MKS ENI RF 13.56 MHz Power Supplies - REPAIR SERVICE


90 Day Warranty 

Price: Call for Quote

Return Material Authorization

To request an RMA, click the button below and fill out the form or contact us directly.


MKS ENI RF 13.56 MHz Power Supplies - REPAIR SERVICE
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Call for a quote or fill out the RFQ form: 90 day warranty repair service and testing on most MKS ENI 13.56 MHz RF plasma power supplies.

ACG Series

  • ACG-3, ACG-3B, ACG-3XL
  • ACG-5, ACG-5J, ACG-5XL
  • ACG-6, ACG-6B, ACG-6M5
  • ACG-10, ACG-10-01, ACG-10B, ACG-10B-01, ACG-10B-02, ACG-10B-03, ACG-10B-07, ACG-10T, ACG-10XL

GHW Series

  • GHW-12A, GHW-12Z
  • GHW-25A, GHW-25Z, GHWE-25
  • GHW-50A, GHW-50Z-07126
  • GHW-55A
  • GHW-58A
  • GHW-85A

MW Series

  • MW-5, MW-5D, MW-5DM11, MW-5D-01A, MW-5D-01B, MW-5D-01M2, MW-5D-01M5, MW-5-21021
  • MW-10, MW-10D, MW-10T, MW-10-21191
  • MW-25D, MW-25D-02M1, MW-25D-02M3
  • MW-3513
  • MWD-25LD-02, MWD-25LD-06
  • MWD-55LD-01
  • MWH-5-01M1, MWH-5-01M2, MWH-5-01M3
  • MWH-25-04
  • MWH-100-1, MWH-100-01, MWH-100-01M6
  • MWM-25-02X

OEM Series

  • OEM-6, OEM-6A, OEM-6B, OEM-6M
  • OEM-650, OEM-650A, OEM-650A-XL
  • OEM-10, OEM-10B
  • OEM-12, OEM-12A, OEM-12A-XL
  • OEM-12B, OEM-12B-02, OEM-12B-07, OEM-12B3, OEM-12B3-02, OEM-12B3-07, OEM-12B3-08, OEM-12L
  • OEM-1250
  • OEM-25, OEM-25A, OEM-25B-01, OEM-25N, OEM-25N-11481, OEM-25N-XL, OEM-25XL
  • OEM-28B-02, OEM-28B-03, OEM-28B-04, OEM-28B-07, OEM-28B-08
  • OEM-50, OEM-50N-11601, OEM-50N-XL
  • OEM-2000

Plasmaloc Series

  • PL-1HF
  • PL-2HF, PL-2HF-11451, PL-2HF-11451-54, PL-2HF-11451-55
  • PL-2HFN-01, PL-2HFN-1
  • PL-3HF

RFC Series

  • RFC-5MW
  • RFC-6-01, RFC-6-02

Request an RMA  Return Material Authorization

Need an exchange?  We recognize that some replacements are more critical than others or that it is not convenient to remove a pump without the replacement immediately at hand. On our form, check the box to request an exchange and we will follow up with current availability.

Procedures for shipping used equipment to PTB Sales:

There is a $300 Evaluation Fee. This gets applied to the cost of repair.

Questions? Please call our toll free number at 866-332-0500 or send an e-mail to our sales team!