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MKS ENI ACG-10B 13.56 MHz RF Power Supply

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MKS ENI ACG-10B 13.56 MHz RF Power Supply
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MKS ENI ACG-10B 13.56 MHz Solid State RF Plasma Generator

MKS ENI ACG-10B

The ENI model ACG-10B generator is a totally solid state, air cooled RF power source expressly designed for use in gas plasma and sputtering applications. The generator utilizes conservatively rated solid state components and automatic power control circuitry to ensure reliable and continuous performance. Completely self-contained, the ACG-10B provides all of the control and monitoring functions needed in a state-of-the-art power generator, which will provide up to 1,000W of output power into a 50Ω load.

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Rated power output (into 50 ohm load) 1,000 W
Frequency / stability 13.56 MHz ± 0.005%
Dynamic power range < 5W - 1,000 W
Load impedance range Unlimited
RF stability / spurious output Unconditionally stable for any load within operational limits < -60 dBc
Harmonic output & distortion < -55 dBc
Load mismatch protection Automatic; forward power limits typically 0.1 ms after reverse power reaches 200 W or power amplifier current exceeds preset limit.
Regulation tolerance load VSWR 1.0:1 - 1.1:1     5 - 1,000 W; ±1.5% SP ±5.0 W
Primary AC power source 190-252 VAC selectable, 4 taps, 50-60 Hz
Cooling system Forced air; +10°C to +40°C
Power readout Fwd/Rev/Load front panel power display; digital
Safety compliance UL Listed as Miscellaneous Electrical Equipment. Certified to EN60950:1992; A1:1993/A2:1993; DIN VDE 0160:1988; A2:1989; EN 60215: 1989; A1: 1990
EMC compliance Classified as ISM equipment, Group 2, Class A; Complies to EN55011: 1991 as Group 2, Class A Equipment; Complies with EN50081-2: 1993 & EN50082- 2: 1995
Weight 95 lbs (43.1 kg)
Remote interface connectors Subminiature Type-D Standard: 15-pin Optional: 25-pin (acces. connectors supplied) Digital: 9-pin
Standard interface inputs RF Power On: TTL compatible; switch contacts External Control: 0-10 VDC positive pulse input, external potentiometer
Standard interface outputs RF On and Maximum RF Power Indicators: TTL Compatible Forward & Reverse Power Indicators: Factory set to 1.00 V per kW; direct reading on digital voltmeter.
RF output connector Type N

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MKS ENI ACG-10B 13.56 MHz Solid State RF Plasma Generator

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