MKS ENI ACG-5
USED MKS ENI ACG-5 13.56 MHz RF Power Supply
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Frequency | 13.56 MHz |
Frequency stability | +/-.005% maximum |
RF output impedance | 50Ω |
Power line | Power supply taps provided for 200/208/225/240 VAC ±8%, at 8A or less at full power output. Single-phase, 50-60Hz |
RF power control | Automatically forward power leveled, front panel or external selection |
Maximum power output | More than 500W into 50Ω |
Harmonic distortion | All harmonics are more than 55dB below the fundamental. Noise, hum and ripple more than 30dB down at maximum power output. |
AC line-to-power regulation | 0.25% maximum change in output power for 7.5% change in AC line voltage |
Power output meter | 0 to 600W with an accuracy of 4% of full scale. Forward and reverse power by switch selection. |
Automatic forward power leveling | lW to 500W; internally or externally controlled |
Power foldback protection | Automatic, occurs when reverse power reaches 100W or power amplifier current exceeds preset limit |
Pulsed operation | Rise time is less than 100µs; RF output may be controlled simultaneously for amplitude and pulse width |
Automatic forward power regulation | ±10% of set power for load variations from 1:1 VSWR to ∞:1 VSWR (within foldback limits) |
Load mismatch tolerance | The unit will operate continuously into any load without oscillation or failure |
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USED MKS ENI ACG-5 13.56 MHz RF Power Supply