MKS ENI ACG-5 13.56 MHz RF Power Supply

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MKS ENI ACG-5 13.56 MHz RF Power Supply

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MKS ENI ACG-5 13.56 MHz RF Power Supply

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Frequency	13.56 MHz
Frequency stability	+/-.005% maximum
RF output impedance	50Ω
Power line	Power supply taps provided for 200/208/225/240 VAC ±8%, at 8A or less at full power output. Single-phase, 50-60Hz
RF power control	Automatically forward power leveled, front panel or external selection
Maximum power output	More than 500W into 50Ω
Harmonic distortion	All harmonics are more than 55dB below the fundamental. Noise, hum and ripple more than 30dB down at maximum power output.
AC line-to-power regulation	0.25% maximum change in output power for 7.5% change in AC line voltage
Power output meter	0 to 600W with an accuracy of 4% of full scale. Forward and reverse power by switch selection.
Automatic forward power leveling	lW to 500W; internally or externally controlled
Power foldback protection	Automatic, occurs when reverse power reaches 100W or power amplifier current exceeds preset limit
Pulsed operation	Rise time is less than 100µs; RF output may be controlled simultaneously for amplitude and pulse width
Automatic forward power regulation	±10% of set power for load variations from 1:1 VSWR to ∞:1 VSWR (within foldback limits)
Load mismatch tolerance	The unit will operate continuously into any load without oscillation or failure

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