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MKS ENI GHW-50A Genesis 13.56 MHz RF Plasma Generator

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Manufacturer Part Number: S-02-042
Stock # 0190-07492
MKS ENI GHW-50A Genesis 13.56 MHz RF Plasma Generator
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MKS ENI GHW-50A Genesis 13.56 MHz RF Plasma Generator

The GHW-25 / GHW-50 Genesis plasma generator is a rugged RF power source for plasma etching, CVD and sputtering applications. Featuring precise power control and digital interfacing, this Genesis generator provides the exceptional reliability and repeatability required for today's demanding plasma processes.

Operating at the frequency of 27.12 MHz, 13.56 MHz or 40.68 MHz, the GHW-25 / GHW-50 Genesis generator produces 2,500W or 5,000W of power into a 50Ω load. The DSP-based control module automatically measures forward RF power and reflected RF power, maintaining constant power output within ±1% of set point over a dynamic power range of < 0 to 3,000 watts or 0 to 5,000 watts.

Precise power calibration is traceable to NIST (National Institute of Standards and Technology) through the ENI Power Standard. Low harmonic distortion and spurious-free performance complement the unit's RF power output control and unconditional RF stability.

A rugged RF power section ensures substantial power delivery into fixed match systems. The DSP-based control constantly monitors internal subsystem status to maximize system availability. Extensive built-in diagnostics and internal fail-safe memory simplify maintenance requirements and increase system uptime.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Genesis GHW-25 GHW-50
Frequency 13.56 MHz
Rated power output 2,500W into 50Ω load 5,000W into 50Ω load
Mismatched power output Worst phase forward power referenced to rating:
Nominal
2,500W
2,000W
1,500W
VSWR
1.5:1
2.0:1
3.0:1
Nominal
5,000W
4,000W
2,500W
VSWR
1.5:1
2.0:1
3.0:1
Dynamic power range 0 to 2,500W 0 to 5,000W
Load impedance range Unlimited
RF stability / spurious output Unconditionally stable for any load within operational limits / < -50dBc
Harmonic output / distortion < -40dBc
Power control / regulation AC line-to-power: 0.5% max. change in output power over rated line voltage range.
Regulation tolerance is referenced from set point. Subject to limits of forward and reverse power and current, accuracy relative to ENI Power Standard 8000-517-TP.
Power range
> 250W
< 250W
Reg. tolerance
± 2%
± 5W
Power range
> 500W
< 500W
Reg. tolerance
± 1%
± 5W
Load mismatch protection Automatic; forward power limits typically 0.25ms after reverse power reaches a pre-programmed level 20% of rated power
Primary AC power source 200/208 VAC nominal (180V-230V) at 15A - North American version; 380/400 VAC nominal (342-440V) at 7.5A - European version; three-phase 47Hz min to 63Hz max 200/208 VAC nominal (180V-230V) at 30A - North American version; 380/400 VAC nominal (342-440V) at 15A - European version; 3-phase 47Hz min to 63Hz max
Power consumption 5.4KVA
Power factor at max output into 50Ω > 0.85
Cooling system Water flow at 2.0 gal/min (6.6 liters) min. at +5° to +35°C. Connections provided to accept 3/8" male (NPT) pipe thread
EMC & safety compliance Product will be NRTL listed and compliant to the European Union's Low-Voltage Directive
Product will be compliant to the European Union's EMC Directive
Power indicator Optional digital readout displays frequency and forward, reflected and load power
Size* (H x W x D) 5.25 x 19" rack mount x 20.5" (133 x 483 x 521 mm) 8.72 x 18.90" rack mount x 22.10" (221. 5 x 480 x 560 mm)
Weight 55 lbs (24.9 kg) 91 lbs (41 kg)
Remote interface connector Standard: Subminiature Type D 9-pin digital; optional custom analog interface cards available
RF output connector Type N or custom Type HN or custom
Rack mounting 19-inch adapters supplied

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MKS ENI GHW-50A Genesis 13.56 MHz RF Plasma Generator

GHW50A-S-02-042, AMAT 0190-07492
GHW55A-13DF4L0-001