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MKS ENI GHW-85A Genesis

Manufacturer Part Number: GHW85A-13DF2L0-001
Price: $7,500.00
MKS ENI GHW-85A Genesis
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MKS ENI GHW-85A Genesis

USED MKS ENI GHW-85A Genesis 13.56 MHz RF Plasma Generator


The GHW-80/85 Genesis plasma generators are rugged RF power sources for plasma etching, CVD and sputtering applications. Featuring precise power control and digital interfacing, the GHW-80/85 provides the exceptional reliability and repeatability required for today's demanding plasma processes.

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Frequency 13.56 MHz
Frequency accuracy < 100 ppm
Frequency stability < ±0.005%
Rated power output 100 - 8,500 W w/ ref. to 50Ω
Power stability ± 1% of set point (from cold start)
Spurious & harmonic output < -50 dB (50Ω load)
Power factor (at 8 kW) 0.7
Power control/regulation Front panel or remote analog input (0-10 VDC = 0-10,000 W)
Power linearity ±1% of set point
Analog interface connector 15-pin female socket, bail lock
Dimensions & rack mounting 17"(W) x 22"(0) x 17.5"(H) (10 EIA units)
Weight 175 lbs (80 kg)
Mismatched power output Worst phase forward power ref. to rating:
Load mismatch protection Automatic; forward power limits typically 0.25 ms after reverse power reaches 1,400 W
Primary AC power source 200-208 VAC; 65 A/phase three-phase 47-63 Hz
Cooling system & requirements Water and forced air
    Flow rate ≥ 10 liters/minute
    Pressure 2.4 to 4.2 kG/cm3
    Temperature +5 to +35°C

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USED MKS ENI GHW-85A Genesis 13.56 MHz RF Plasma Generator