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MKS ENI MWD-55LD RF 13.56 MHz Matching Network

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Manufacturer Part Number: MWD-55LD-01
MKS ENI MWD-55LD RF 13.56 MHz Matching Network
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MKS ENI MWD-55LD RF 13.56 MHz Matching Network

MKS ENI MWD-55LD

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Rated RF power 300 kVA max
RF input power 50 - 5,500 W
Frequency 13.56 MHz
Input impedance 50Ω
Output impedance (standard) 1-8Ω, real part
Output impedance (extended) Consult factory
Temperature Operational: 5 to 45°C, 0-95% RH
Storage: 25 to 70°C; 0-95% RH
RF input connector UG-352 AIU (small LC-type)
RF output connector ENI P/N 012-9007-800 coaxial assy
HVDC input connector UG-931/U (HV BNC)
Digital interface SYSTEM port RS-232: 300-115,200 baud, 8 data, 1 stop, no parity
Digital interface DEBUG port RS-232: 19,200 baud, 8 data, 1 stop, no parity
AC input power required 100 to 240 VAC, ±10%, 47~63 Hz, 1-phase, < 180 VA
AC input receptacle DOK #CE05-2A 18-1 0PD-B
Mating AC cable connector plug
(required for SEMI 592-3 approval)
DOK #CE05-6A18-10SD
AC power switch Illuminated rocker switch
Operation Standalone automatic; automatic, remote or manual w/ external control
Pre-positioning Automatic, remote or manual control of both tuning elements
Control / monitoring Serial digital control and monitoring. Parallel analog interface for monitoring only.
Size (H X D X W) 500 mm x 480.1 mm x 176.3 mm (19. 7" X 18.9" X 6.94")
Weight 22.7 kg (50 lbs)
Maximum operating altitude 2,000 m (6,562 ft) above sea level
Cooling system Forced-air cooling; water-cooling is optional
Cooling water Not used in MWD-55LD-01
Inlet temperature rating 5-35°C (41-95°F)
Pressure range 30-45 psi
Flow rate minimum 1.0 ltr/min (0.27 gal/min)
Temperature rating 5-40°C (41-104°F)
Relative humidity rating 80% RH (max.) at up to 31°C (88°F), de-rated linearly to 50% RH (max.) at 40°C (104°F)
Installation (overvoltage) category INSTALLATION CATEGORY II:
Local level, appliances, portable equipment, etc., with smaller transient overvoltages than distribution level and fixed equipment.
Pollution degree POLLUTION DEGREE 2:
Normally only non-conductive pollution occurs. Occasionally, however, a temporary conductivity caused by condensation must be expected.
Electromagnetic compatibility (EMC)     EMC compliant with standards:
EN 50081-2 : 1992
    Group 2, Class A
EN 50082-2 : 1995
Product safety NRTL listed to standards:
CAN/CSA C22.2 No. 1010.1-92
Category 290
EN 61010-1 : 1993/A2: 1995 (Pending)
Category 387
UL3111-1 : 1994
Category 435
CE compliance CE marked
Equipment internal fuse ratings Fuse F1 (ENI P/N 311002) on controller PCB assy. (ENI PIN 000-9004-300)
10 AF, 125 V fuse F1 (ENI P/N 301034) on component power supply (ENI PIN 501002)
4 AF, 250 V, 5 x 20 mm

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MKS ENI MWD-55LD RF 13.56 MHz Matching Network