MKS ENI MWD-55LD
Manufacturer Part Number: MWD-55LD-01
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MKS ENI MWD-55LD
USED MKS ENI MWD-55LD RF 13.56 MHz Matching Network
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| Rated RF power | 300 kVA max |
| RF input power | 50 - 5,500 W |
| Frequency | 13.56 MHz |
| Input impedance | 50Ω |
| Output impedance (standard) | 1-8Ω, real part |
| Output impedance (extended) | Consult factory |
| Temperature | Operational: 5 to 45°C, 0-95% RH Storage: 25 to 70°C; 0-95% RH |
| RF input connector | UG-352 AIU (small LC-type) |
| RF output connector | ENI P/N 012-9007-800 coaxial assy |
| HVDC input connector | UG-931/U (HV BNC) |
| Digital interface SYSTEM port | RS-232: 300-115,200 baud, 8 data, 1 stop, no parity |
| Digital interface DEBUG port | RS-232: 19,200 baud, 8 data, 1 stop, no parity |
| AC input power required | 100 to 240 VAC, ±10%, 47~63 Hz, 1-phase, < 180 VA |
| AC input receptacle | DOK #CE05-2A 18-1 0PD-B |
| Mating AC cable connector plug (required for SEMI 592-3 approval) |
DOK #CE05-6A18-10SD |
| AC power switch | Illuminated rocker switch |
| Operation | Standalone automatic; automatic, remote or manual w/ external control |
| Pre-positioning | Automatic, remote or manual control of both tuning elements |
| Control / monitoring | Serial digital control and monitoring. Parallel analog interface for monitoring only. |
| Size (H X D X W) | 500 mm x 480.1 mm x 176.3 mm (19. 7" X 18.9" X 6.94") |
| Weight | 22.7 kg (50 lbs) |
| Maximum operating altitude | 2,000 m (6,562 ft) above sea level |
| Cooling system | Forced-air cooling; water-cooling is optional |
| Cooling water | Not used in MWD-55LD-01 |
| Inlet temperature rating | 5-35°C (41-95°F) |
| Pressure range | 30-45 psi |
| Flow rate minimum | 1.0 ltr/min (0.27 gal/min) |
| Temperature rating | 5-40°C (41-104°F) |
| Relative humidity rating | 80% RH (max.) at up to 31°C (88°F), de-rated linearly to 50% RH (max.) at 40°C (104°F) |
| Installation (overvoltage) category | INSTALLATION CATEGORY II: Local level, appliances, portable equipment, etc., with smaller transient overvoltages than distribution level and fixed equipment. |
| Pollution degree | POLLUTION DEGREE 2: Normally only non-conductive pollution occurs. Occasionally, however, a temporary conductivity caused by condensation must be expected. |
| Electromagnetic compatibility (EMC) | EMC compliant with standards: EN 50081-2 : 1992 Group 2, Class A EN 50082-2 : 1995 |
| Product safety | NRTL listed to standards: CAN/CSA C22.2 No. 1010.1-92 Category 290 EN 61010-1 : 1993/A2: 1995 (Pending) Category 387 UL3111-1 : 1994 Category 435 |
| CE compliance | CE marked |
| Equipment internal fuse ratings | Fuse F1 (ENI P/N 311002) on controller PCB assy. (ENI PIN 000-9004-300) 10 AF, 125 V fuse F1 (ENI P/N 301034) on component power supply (ENI PIN 501002) 4 AF, 250 V, 5 x 20 mm |
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USED MKS ENI MWD-55LD RF 13.56 MHz Matching Network
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