Home > Power Supplies > DC Sputtering > MKS ENI > MKS ENI RPG-50 5KW Pulsed DC Plasma Generator
Email Link Tweet This Share on Facebook

MKS ENI RPG-50 5KW Pulsed DC Plasma Generator

90 Day Warranty 

Request for Quote

To request a quote, click the button below and fill out the form.

RFQ

Manufacturer Part Number: RPG-50A-00
MKS ENI RPG-50 5KW Pulsed DC Plasma Generator
Click Image to Enlarge

MKS ENI RPG-50 5KW Pulsed DC Plasma Generator

The ENI RPG is a Asymmetric bipolar pulsed DC, which contains one power module that provides up to 5kW of pulsed DC. It is designed with a multi-tap output transformer to match any load condition.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Frequency Programmable from 25 to 125 kHz or 50 to 250 kHz
Duty cycle Programmable from 0 to 40% (reverse bias)
Power output 5 kW
Power limit 5.25 kW for rated 5 kW output; proportional at other power levels
Current limit 10.5 A
Regulation modes Volts, amps, watts
Output control modes Ramping, run time, joule, sequence, constant run
DC linearity / accuracy  
    Independent of regulation mode ± 0.1%: 10 - 100% of rated output
    In watts mode ± 0.25%: 1 - 10% of rated output
Line regulation ± 0.1% for ± 10% line voltage change
± 2% line frequency change
Load regulation ± 0.1% for a 4:1 load impedence range
Line voltage & current  
    AC input (3-phase)/nom/max 200 - 208 V (± 10%) / 19 A / 25 A
400 V (± 10%) / 11A / 14 A
480 V (± 10%) / 9A / 11 A
Line frequency 50 and 60 Hz, ± 2%
Line-to-output efficiency > 85%
Input power factor > 0.7 at maximum power output
Front panels  
    Fully functional Provides complete control and monitoring from the master unit
    Remote Provides complete remote control and monitoring functions
    Blank Three LED’s indicate AC on, DC on & fault
Cooling system Forced air; front panel & right side in, rear panel out
Weight 55 lbs (25 kg)
Dimensions (H x W x D) 5.22” x 18.9” x 24.8” (132.5 x 480 x 631 mm) including rack mount & handles
Safety compliance NRTL: UL 3111-1 (1994)
CAN/CSA C22.2 No. 1010.1-92
EN61010-1:1993/A2:1995
EMC compliance EN50081-2: 1992
EN50082-2: 1995
Shock resistance (certified to meet)     IEC 68-2-9 test for bump
IEC 68-2-6 test for vibration
IEC 68-2-23 test for bump
Environmental conditions  
    Operating temperature 5 to 40°C
    Relative humidity (operational) 80% RH maximum at up to 31°C (decreasing linearly to 50% RH maximum at 40°C)
    Max. operating altitude +3,500 meters above sea level
Standard connectors  
Digital interface 9-pin Type D with RS 232/422, Profibus®, ENI Protocol, DNET
Output PL259, UHF female
AC input 5 terminal barrier strip
Interlock 2 terminal PC header
Rack Mounting EIA (Standard)
Universal JIS Bracket (optional)

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

MKS ENI RPG-50 5KW Pulsed DC Plasma Generator

Product Reviews

There are currently no customer reviews for this product.

Be the first to write a review!
We value your opinion. Please take a moment and share what you like or don't like about a product.

Write a review now