COOLVAC vacuum pumps are refrigerator cryo pumps which generate a vacuum when gaseous substances are bound to the cold surfaces within the pump by means of cryocondensation. Because of the pumping principle COOLVAC cryo pumps have a high effective pumping speed for all gases. COOLVAC vacuum pumps produce a hydro carbon free ultra high vacuum inthe pressure range from 10-3 mbar to 10-11 mbar (0.75 x 10-3 to 0.75 x 10-11 Torr).

Effective as of September 1, 2016, Atlas Copco AB (Stockholm, Sweden) owns the former Oerlikon Leybold Vacuum, renamed to Leybold.