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Leybold TURBOVAC 1000 C Turbo Vacuum Pump - NEW

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Manufacturer Part Number: 85535
Leybold TURBOVAC 1000 C Turbo Vacuum Pump - NEW
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Leybold TURBOVAC 1000 C Turbomolecular Vacuum Pump - NEW

The TURBOVAC turbomolecular vacuum pumps with mechanical rotor suspension are used in the pressure range from 10-1 mbar (0.75 x 10-1 Torr) to 10-10 mbar (0.75 x 10-1 Torr). Pumping speeds for air vary from 35 l/s to 2,400 l/s. Because of its compact design, the most reliable ceramics ball bearings and the simplicity of operation, this line of pumps is used in all high vacuum and ultrahigh vacuum areas of application.

Typical Applications

  • Evaporation and sputtering
  • Metallurgy
  • Research systems

Technical Features

  • Robust rotor design
  • Installation in any orientation
  • Highest pumping speed and highest throughput
  • Bearing temperature measurement through the TURBO.DRIVE TD 20 classic
  • Seal gas connection
  • Venting connection

Advantages to the User

  • Installation in any orientation
  • Highly reliable due to hybrid ceramic ball bearings
  • Standard model: water cooling
  • Purge gas facility

TURBOVAC 1000 / 1100 Comparison

Inlet flange DN 160 ISO-K • 100 CF DN 200 ISO-K • 160 CF DN 250 ISO-K
Pumping speed
    N2    l x s-1 850 1,100 1,150
    He    l x s-1 880 975 1,000
    H2    l x s-1 900 970 1,000
Max. gas throughput
    N2    mbar x l x s-1 6.5
Compression ratio
    N2 > 109
    He 5 x 104
    H2 2 x 103
Ultimate pressure    mbar (Torr) < 10-10 (< 10-10)
Operating speed 36,000 min-1
Run-up time at 95% speed of nominal speed 9 min
Max. continuous inlet pressure    mbar (Torr) 1 x 10-2 (0.75 x 10-2)
Foreline connection KF40
Mounting position Any
Bearing type Grease/ceramic ball bearing
Corrosive version (C) Yes
Cooling Standard: Water • Available: Air
Recommended forevacuum pump
    Standard TRIVAC D 25 B / D 40 B
    Purge gas TRIVAC D 40 B / D 65 B
Weight 25 kg (55.1 lbs)
Frequency converter TD 20, NT 20, NT 1000/1500

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Leybold TURBOVAC 1000 C Turbomolecular Vacuum Pump - NEW

Part no. 85535
Pumping speed: 850 l / s (Nitrogen)
Ultimate pressure: < 1 x 10-10 mbar
Connecting flange high-vacuum: DN 160 ISO-K
Connecting flange fore-vacuum: DN 40 ISO-KF water-cooled

Part no. 85538
Pumping speed: 850 l / s (Nitrogen)
Ultimate pressure: < 1 x 10-10 mbar
Connecting flange high-vacuum: DN 160 ISO-K
Connecting flange fore-vacuum: DN 63 ISO-K water-cooled

Part no. 85491
Pumping speed: 850 l / s (Nitrogen)
Ultimate pressure: < 1 x 10-10 mbar
Connecting flange high-vacuum: DN 160 CF
Connecting flange fore-vacuum: DN 40 ISO-KF water-cooled

Part no. 15300
Pumping speed: 1,100 l / s (Nitrogen)
Ultimate pressure: < 1 x 10-10 mbar
Connecting flange high-vacuum: DN 200 ISO-K
Connecting flange fore-vacuum: DN 40 ISO-KF water-cooled

Part no. 11764
Pumping speed: 1,100 l / s (Nitrogen)
Ultimate pressure: < 1 x 10-10 mbar
Connecting flange high-vacuum: DN 200 CF
Connecting flange fore-vacuum: DN 40 ISO-KF water-cooled

Part no. 85536
Pumping speed: 1,150 l / s (Nitrogen)
Ultimate pressure: < 1 x 10-10 mbar
Connecting flange high-vacuum: DN 250 ISO-K
Connecting flange fore-vacuum: DN 40 ISO-KF water-cooled

Part no. 85539
Pumping speed: 1,150 l / s (Nitrogen)
Ultimate pressure: < 1 x 10-10 mbar
Connecting flange high-vacuum: DN 250 ISO-K
Connecting flange fore-vacuum: DN 63 ISO-K water-cooled

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