Leybold TURBOVAC 1100 C Turbo Vacuum Pump - NEW
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Leybold TURBOVAC 1100 C Turbomolecular Vacuum Pump - NEW
The TURBOVAC turbomolecular vacuum pumps with mechanical rotor suspension are used in the pressure range from 10-1 mbar (0.75 x 10-1 Torr) to 10-10 mbar (0.75 x 10-1 Torr). Pumping speeds for air vary from 35 l/s to 2,400 l/s. Because of its compact design, the most reliable ceramics ball bearings and the simplicity of operation, this line of pumps is used in all high vacuum and ultrahigh vacuum areas of application.
- Data storage
- Flat panel displays
- Optical coating
- Large area coating
- R & D: Fusion experiments, space simulation
- Load locks and transfer chambers
- Robust rotor design
- Installation in any orientation
- Highest pumping speed and throughput
- Bearing temperature measurement through the TURBO.DRIVE TD 20 classic
- Oil-free pump for generating clean high and ultrahigh vacuum conditions
Advantages to the User
- Easy to integrate into complex vacuum systems
- High productivity
- Low operating costs
- Highly reliable operation also in processes loaded with particles
|Inlet flange||DN 160 ISO-K||DN 200 ISO-K||DN 250 ISO-K|
|N2 l x s-1||710||830||1,050|
|Ar l x s-1||-||760||980|
|He l x s-1||-||750||850|
|H2 l x s-1||-||600||630|
|Max. gas throughput|
|N2 mbar x l x s-1||6.5|
|Ar mbar x l x s-1||6.5|
|N2||1 x 105|
|Ar||1 x 105|
|H2||1 x 104|
|Ultimate pressure mbar (Torr)||< 3 x 10-10 (< 2.2 x 10-10)|
|Run-up time at 95% speed of nominal speed||9 min|
|Max. foreline pressure for N2 mbar (Torr)||0.1 (0.075)|
|Bearing type||Grease/ceramic ball bearing|
|Corrosive version (C)||Yes|
|Cooling||Standard: Water • Available: Air|
|Recommended forevacuum pump||TRIVAC D 65 B / SCROLLVAC SC 15 / 30 D|
|Purge / vent port||DN 10 KF|
|Cooling water connection (hose nozzles)||10 mm (0.39 in)|
|Weight||22 kg (48 lbs)|
|Frequency converter||TD 20, NT 20, NT 1000/1500|
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Leybold TURBOVAC 1100 C Turbomolecular Vacuum Pump - NEW Part no. 800150V0030 Pumping speed: 710 l / s (Nitrogen) Ultimate pressure: < 3 x 10-10 mbar Connecting flange high-vacuum: DN 160 ISO-K Connecting flange fore-vacuum: DN 63 ISO-K water-cooled Part no. 800150V0031 Pumping speed: 830 l / s (Nitrogen) Ultimate pressure: < 3 x 10-10 mbar Connecting flange high-vacuum: DN 200 ISO-K Connecting flange fore-vacuum: DN 63 ISO-K water-cooled Part no. 800150V0032 Pumping speed: 1,050 l / s (Nitrogen) Ultimate pressure: < 3 x 10-10 mbar Connecting flange high-vacuum: DN 250 ISO-K Connecting flange fore-vacuum: DN 63 ISO-K water-cooled
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