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Leybold TURBOVAC 1100 C Turbo Vacuum Pump - NEW

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Manufacturer Part Number: 800150V0030
Leybold TURBOVAC 1100 C Turbo Vacuum Pump - NEW
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Leybold TURBOVAC 1100 C Turbomolecular Vacuum Pump - NEW

The TURBOVAC turbomolecular vacuum pumps with mechanical rotor suspension are used in the pressure range from 10-1 mbar (0.75 x 10-1 Torr) to 10-10 mbar (0.75 x 10-1 Torr). Pumping speeds for air vary from 35 l/s to 2,400 l/s. Because of its compact design, the most reliable ceramics ball bearings and the simplicity of operation, this line of pumps is used in all high vacuum and ultrahigh vacuum areas of application.

Typical Applications

  • Data storage
  • Flat panel displays
  • Optical coating
  • Large area coating
  • R & D: Fusion experiments, space simulation
  • Load locks and transfer chambers

Technical Features

  • Robust rotor design
  • Installation in any orientation
  • Highest pumping speed and throughput
  • Bearing temperature measurement through the TURBO.DRIVE TD 20 classic
  • Oil-free pump for generating clean high and ultrahigh vacuum conditions 

Advantages to the User

  • Space-saving
  • Easy to integrate into complex vacuum systems
  • High productivity
  • Low operating costs
  • Highly reliable operation also in processes loaded with particles 

TURBOVAC 1000 / 1100 Comparison

Inlet flange DN 160 ISO-K DN 200 ISO-K DN 250 ISO-K
Pumping speed
    N2    l x s-1 710 830 1,050
    Ar    l x s-1 - 760 980
    He    l x s-1 - 750 850
    H2    l x s-1 - 600 630
Max. gas throughput
    N2    mbar x l x s-1 6.5
    Ar    mbar x l x s-1 6.5
Compression ratio
    N2 1 x 105
    Ar 1 x 105
    H2 1 x 104
Ultimate pressure    mbar (Torr) < 3 x 10-10 (< 2.2 x 10-10)
Run-up time at 95% speed of nominal speed 9 min
Max. foreline pressure for N2    mbar (Torr) 0.1 (0.075)
Foreline connection KF40
Mounting position Any
Bearing type Grease/ceramic ball bearing
Corrosive version (C) Yes
Cooling Standard: Water • Available: Air
Recommended forevacuum pump TRIVAC D 65 B / SCROLLVAC SC 15 / 30 D
Purge / vent port DN 10 KF
Cooling water connection (hose nozzles) 10 mm (0.39 in)
Weight 22 kg (48 lbs)
Frequency converter TD 20, NT 20, NT 1000/1500

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Leybold TURBOVAC 1100 C Turbomolecular Vacuum Pump - NEW

Part no. 800150V0030
Pumping speed: 710 l / s (Nitrogen)
Ultimate pressure: < 3 x 10-10 mbar
Connecting flange high-vacuum: DN 160 ISO-K
Connecting flange fore-vacuum: DN 63 ISO-K water-cooled

Part no. 800150V0031
Pumping speed: 830 l / s (Nitrogen)
Ultimate pressure: < 3 x 10-10 mbar
Connecting flange high-vacuum: DN 200 ISO-K
Connecting flange fore-vacuum: DN 63 ISO-K water-cooled

Part no. 800150V0032
Pumping speed: 1,050 l / s (Nitrogen)
Ultimate pressure: < 3 x 10-10 mbar
Connecting flange high-vacuum: DN 250 ISO-K
Connecting flange fore-vacuum: DN 63 ISO-K water-cooled

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