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Leybold TURBOVAC 361 / C Turbo Vacuum Pump - NEW

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Manufacturer Part Number: 85670
Leybold TURBOVAC 361 / C Turbo Vacuum Pump - NEW
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Leybold TURBOVAC 361 / C Turbomolecular Vacuum Pump - NEW

The TURBOVAC turbomolecular vacuum pumps with mechanical rotor suspension are used in the pressure range from 10-1 mbar (0.75 x 10-1 Torr) to 10-10 mbar (0.75 x 10-1 Torr). Pumping speeds for air vary from 35 l/s to 2,400 l/s. Because of its compact design, the most reliable ceramics ball bearings and the simplicity of operation, this line of pumps is used in all high vacuum and ultrahigh vacuum areas of application.

Typical Applications

  • Leak detectors
  • Mass spectrometers
  • Data storage
  • Optical coating
  • R & D: UHV systems, Particle accelerators
  • Load locks and transfer chambers

Technical Features

  • Small footprint
  • Installation in any orientation
  • Oil-free pump for generating clean high and ultrahigh vacuum conditions 
  • Bearing temperature measurement through the TURBO.DRIVE TD 20 classic

Advantages to the User

  • Space-saving
  • Easy to integrate into complex vacuum systems
  • Low operating costs
  • Highly reliable operation also in processes loaded with particles 

Inlet flange DN 100 ISO-K • 100 CF DN 160 ISO-K • 160 CF
Pumping speed
    N2    l x s-1 345 400
    Ar    l x s-1 350 -
    He    l x s-1 340 380
    H2    l x s-1 340 370
Max. gas throughput
    N2    mbar x l x s-1 3.0
    Ar    mbar x l x s-1 2.5
Compression ratio
    N2 1 x 109
    He 6 x 104
    H2 3 x 103
Ultimate pressure    mbar (Torr) < 1 x 10-10 (< 0.75 x 10-10)
Ultimate partial pressure    mbar <10-10
Max. continuous inlet pressure    mbar (Torr) 5 x 10-2 (4 x 10-2)
Max. foreline pressure for N2    mbar (Torr) 5 x 10-1 (4 x 10-1)
Foreline connection KF25, ISO 63
Mounting position Any
Bearing type Grease/ceramic ball bearing
Corrosive version (C) Yes
Cooling Standard: Water • Available: Air
Recommended forevacuum pump Standard: TRIVAC D 16 B • Corrosive: D 25 B
Run-up time at 95% speed 2 min
Purge / vent port DN 10 KF
Cooling water connection (hose nozzles) 10 mm (0.39 in)
Weight 12 kg (26 lbs)
Max. power consumption / Ultimate pressure 680 / 480 VA
Frequency converter TD 20, NT 20, NT 150/360

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Leybold TURBOVAC 361 / C Turbomolecular Vacuum Pump - NEW

Part no. 85670 
Pumping speed: 345 l / s (Nitrogen)
Ultimate pressure: < 1 x 10-10 mbar
Connecting flange high-vacuum: DN 100 ISO-K
Connecting flange fore-vacuum: DN 25 ISO-KF water-cooled

Part no. 85675 
Pumping speed: 345 l / s (Nitrogen)
Ultimate pressure: < 1 x 10-10 mbar
Connecting flange high-vacuum: DN 100 ISO-K
Connecting flange fore-vacuum: DN 25 ISO-KF water-cooled

Part no. 85671 
Pumping speed: 345 l / s (Nitrogen)
Ultimate pressure: < 1 x 10-10 mbar
Connecting flange high-vacuum: DN 100 CF
Connecting flange fore-vacuum: DN 25 ISO-KF water-cooled

Part no. 11209 
Pumping speed: 345 l / s (Nitrogen)
Ultimate pressure: < 1 x 10-10 mbar
Connecting flange high-vacuum: DN 100 CF
Connecting flange fore-vacuum: DN 25 ISO-KF water-cooled

Part no. 85672 
Pumping speed: 345 l / s (Nitrogen)
Ultimate pressure: < 1 x 10-10 mbar
Connecting flange high-vacuum: DN 160 ISO-K
Connecting flange fore-vacuum: DN 25 ISO-KF water-cooled

Part no. 85677 
Pumping speed: 345 l / s (Nitrogen)
Ultimate pressure: < 1 x 10-10 mbar
Connecting flange high-vacuum: DN 160 ISO-K
Connecting flange fore-vacuum: DN 25 ISO-KF water-cooled

Part no. 85673 
Pumping speed: 345 l / s (Nitrogen)
Ultimate pressure: < 1 x 10-10 mbar
Connecting flange high-vacuum: DN 160 CF
Connecting flange fore-vacuum: DN 25 ISO-KF water-cooled

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