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Leybold TURBOVAC 600 C Turbo Vacuum Pump - NEW

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Manufacturer Part Number: 800150V0015
Leybold TURBOVAC 600 C Turbo Vacuum Pump - NEW
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Leybold TURBOVAC 600 C Turbomolecular Vacuum Pump - NEW

The TURBOVAC turbomolecular vacuum pumps with mechanical rotor suspension are used in the pressure range from 10-1 mbar (0.75 x 10-1 Torr) to 10-10 mbar (0.75 x 10-1 Torr). Pumping speeds for air vary from 35 l/s to 2,400 l/s. Because of its compact design, the most reliable ceramics ball bearings and the simplicity of operation, this line of pumps is used in all high vacuum and ultrahigh vacuum areas of application.

Typical Applications

  • Load locks and transfer chambers
  • Optical coating
  • Flat panel displays
  • R & D

Technical Features

  • Small footprint
  • Installation in any orientation
  • Oil-free pump for generating clean high and ultrahigh vacuum conditions
  • Bearing temperature measurement through the TURBO.DRIVE TD 20 classic
  • Seal gas connection
  • Venting connection

Advantages to the User

  • Installation in any orientation
  • Highly reliable due to hybrid ceramic ball bearings 

Inlet flange DN 160 ISO-K • 160 CF
Pumping speed
    N2    l x s-1 560
    He    l x s-1 600
    H2    l x s-1 570
Max. gas throughput
    N2    mbar x l x s-1 < 4
    Ar    mbar x l x s-1 < 4
Compression ratio
    N2 > 109
    He 2 x 104
    H2 1.1 x 103
Ultimate pressure    mbar (Torr) < 10-10 (< 10-10)
Operating speed 36,000 min-1
Run-up time (frequency converter), approx. 4 min
Max. foreline pressure for N2    mbar (Torr) 1 x 10-1 (< 0.75 x 10-1)
Recommended forevacuum pump
    for standard operation TRIVAC D 25 B / D 40 B
    for purge gas operation TRIVAC D 40 B
Run-up time at 95% of nominal speed 3 min
Purge / vent port DN 10 KF
Cooling water connection (hose nozzles) 10 mm (0.39")
Weight 17 kg (37.5 lbs)
Max. power consumption / at ultimate pressure 680 / 480 VA

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Leybold TURBOVAC 600 C Turbomolecular Vacuum Pump - NEW

Part no. 800150V0015
Pumping speed: 560 l / s (Nitrogen)
Ultimate pressure: < 1 x 10-10 mbar
Connecting flange high-vacuum: DN 160 ISO-K
Connecting flange fore-vacuum: DN 40 ISO-KF water-cooled

Part no. 800150V0017
Pumping speed: 560 l / s (Nitrogen)
Ultimate pressure: < 1 x 10-10 mbar
Connecting flange high-vacuum: DN 160 CF
Connecting flange fore-vacuum: DN 40 ISO-KF water-cooled

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