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Pfeiffer Adixen A 604 H - REBUILT

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Pfeiffer Adixen A 604 H - REBUILT
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Pfeiffer Adixen A 604 H - REBUILT

Pfeiffer Adixen A 604 H A4 Series Semiconductor Dry Vacuum Pump - REBUILT

Pfeiffer Vacuum introduces the new A4 series. Harsh duty processes in semiconductor production always provide new challenges for vacuum pumps. Based on the proven and energy efficient multi-stage Roots technology, the A4 series offers a wide range of dry pump solutions, with different pumping speeds from 100 to 2,300 m3/h. Compared to previous process pumps, the corrosion and by-product condensation resistance have been increased significantly to address the latest requirements of 20 nm technology nodes and below. With an extended process lifetime - associated with a low power consumption - the A4 series pumps are counted among those with the lowest cost of ownership in the market.

Pfeiffer Adixen has more information on multi-stage dry pumps. We also offer repair service.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Pfeiffer Adixen A 604 H

Max. peak pumping speed - N2 560 m3/h
Max. ultimate pressure (no purge) 2 x 10-3 hPa
Max. ultimate pressure (50 slm purge) 6 x 10-3 hPa
Max. continuous inlet flow at full rotational speed 60 slm
Power supply 200–230 V / 380–480 V, 3-phase ± 10%, 50/60 Hz
Power consumption at ultimate pressure - no exhaust heater     2.0 kW
Max. exhaust overpressure 1,200 hPa
Cooling water flow 2.5 – 4 l/mn
Cooling water temperature - subject to pump T° setting 10 to 35°C
Water connect 3/8 NPT
N2 purge flow 10 to 120 slm
Operating temperature 5 to 40°C
Inlet flange DN 100 ISO-K
Exhaust flange DN 40 ISO-KF
Dimensions 962 x 388 x 775 mm
Weight 370 kg
Max. vibration level at pump inlet flange < 0.1 g / 1.5 mm/s
Max. noise level at ultimate pressure < 68 dB(A)

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Pfeiffer Adixen A 604 H A4 Series Semiconductor Dry Vacuum Pump - REBUILT